Automatically reigniting dc vacuum arc plasma source

Abstract

A spark reignition system designed and produced to enhance vacuum arc deposition is presented. The system, in which the metal arc can be automatically reignited so as to minimize film contamination, not only initially ignites the arc by means of a spark component, but also reignites the spark automatically when the arc is near extinguishing. This automatic reignition system can effectively curb the pressure fluctuations induced by arc extinction and thus enhance the deposition procedure.