2022
DOI: 10.1002/advs.202200136
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Automated, 3‐D and Sub‐Micron Accurate Ablation‐Volume Determination by Inverse Molding and X‐Ray Computed Tomography

Abstract: Ablation of materials in combination with element-specific analysis of the matter released is a widely used method to accurately determine a material's chemical composition. Among other methods, repetitive ablation using femto-second pulsed laser systems provides excellent spatial resolution through its incremental removal of nanometer thick layers. The method can be combined with high-resolution mass spectrometry, for example, laser ablation ionization mass spectrometry, to simultaneously analyze chemically t… Show more

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Cited by 6 publications
(1 citation statement)
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“…The mass spectrometric analysis involves transformation from the time scale to the mass scale to assign measured mass ion peaks to the corresponding elements (isotopes). The mass peak integration in the time spectrum yields the number of measured ions, and the measurement of all atomic ions provides the means to derive the atomic and isotope concentra- Sub-micrometre vertical and micrometre lateral spatial resolution can be maintained with the control of laser ion source parameters (flexible focussing optics, laser pulse energy tuning) [94][95][96]. The measurements can be performed on raw samples and do not require the application of advanced surface preparation methods.…”
Section: Laser Mass Spectrometer (Lms)mentioning
confidence: 99%
“…The mass spectrometric analysis involves transformation from the time scale to the mass scale to assign measured mass ion peaks to the corresponding elements (isotopes). The mass peak integration in the time spectrum yields the number of measured ions, and the measurement of all atomic ions provides the means to derive the atomic and isotope concentra- Sub-micrometre vertical and micrometre lateral spatial resolution can be maintained with the control of laser ion source parameters (flexible focussing optics, laser pulse energy tuning) [94][95][96]. The measurements can be performed on raw samples and do not require the application of advanced surface preparation methods.…”
Section: Laser Mass Spectrometer (Lms)mentioning
confidence: 99%