2011
DOI: 10.1063/1.3583983
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Atomistic approach to alloy scattering in Si1−xGex

Abstract: SiGe alloy scattering is of significant importance with the introduction of strained layers and SiGe channels into complementary metal-oxide semiconductor technology. However, alloy scattering has till now been treated in an empirical fashion with a fitting parameter. We present a theoretical model within the atomistic tight-binding representation for treating alloy scattering in SiGe. This approach puts the scattering model on a solid atomistic footing with physical insights. The approach is shown to inherent… Show more

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Cited by 26 publications
(16 citation statements)
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References 13 publications
(11 reference statements)
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“…36 Generally, however, δV deviates from the conduction band differences, 156 and should be estimated from empirical tightbinding parameters. [169][170][171][172] Using Eqs. (113) and (114), the matrix element Eq.…”
Section: Alloy Scatteringmentioning
confidence: 99%
See 1 more Smart Citation
“…36 Generally, however, δV deviates from the conduction band differences, 156 and should be estimated from empirical tightbinding parameters. [169][170][171][172] Using Eqs. (113) and (114), the matrix element Eq.…”
Section: Alloy Scatteringmentioning
confidence: 99%
“…This figure shows the exact (solid) as well as the approximated [Eq. (169), dashed] result of (1 + 2N Q ) at 19 meV.…”
Section: Scattering From Longitudinal Acoustic Phononsmentioning
confidence: 99%
“…[3]. We extend the atomistic approach to be applicable to general devices as well as bulk materials [6].…”
Section: Simulation Modelmentioning
confidence: 99%
“…Alloy scattering is an elastic scattering mechanism that happens when a moving carrier faces a varying potential landscape due different atomic species. An effective scattering potential Δ U is used to describe the strength of the alloy scattering rate 4. The momentum relaxation rate due to alloy disorder in Si 1– x Ge x can be written as in Eq.…”
Section: Simulation Approachmentioning
confidence: 99%
“…Si 1– x Ge x is expected to suffer from added alloy disorder besides the scattering due to phonons at room temperature. The role of alloy and phonon scattering in bulk and thin body Si 1– x Ge x structures has been discussed extensively in literature, however, little theoretical work has been done in regard to nanowires 3–5. In this work, phonon and alloy mobility calculations are performed for 5 nm diameter intrinsic SiGe nanowires at low carrier concentration of p = 5 × 10 18 cm –3 .…”
Section: Introductionmentioning
confidence: 99%