Atomic Layer Deposition on Electrospun Polymer Fibers as a Direct Route to Al₂O₃ Microtubes with Precise Wall Thickness Control

Abstract

Atomic layer deposition (ALD) of Al2O3 on electrospun poly(vinyl alcohol) microfiber templates is demonstrated as an effective and robust strategy by which to fabricate long and uniform metal-oxide microtubes. The wall thickness is shown to be precisely controlled within a molecular layer or so by adjusting the number of ALD cycles utilized. By judicious selection of the electrospinning and ALD parameters, designer tubes of various sizes and inorganic materials can be synthesized.

Spatial atomic layer deposition: A route towards further industrialization of atomic layer deposition

“…49,50 Although less well known than other methods in the industry, vapor phase atomic layer deposition (ALD) is known to penetrate inside complex fibrous structures to create conformal and uniform coatings of inorganic or inorganic-organic thin films that modify the surface finish. 51,52 ALD is particularly advantageous compared to wet chemical processes since ALD is highly efficient, it leaves no liquid chemical waste, and it requires no expensive thermal drying steps after coating. Recent reports by researchers at North Carolina State University show that ALD can promote wetting transitions on polypropylene and cotton fibers, 53 and this ALD treatment can then enable more advanced functionalization.…”

Water-soluble non-polymeric electrospun cyclodextrin nanofiber template for the synthesis of metal oxide tubes by atomic layer deposition

“…[1][2][3][4][5][6][7][8][9][10] In fact ALD can yield coral, 6 core-shell, 4,5,11 hollow 6,7,9 like complex nanostructures. Although various polymers are the subjects of electrospinning, the compatibility between the polymer and the ALD precursor is vital.…”

Atomic layer deposition for electrochemical energy generation and storage systems

“…125,129 This development would open up great yet-to-explored opportunities to organize organic and/or inorganic components in a vector mode for desired electron and charge transfer properties, 23 chemical properties, 123 and structural properties. 125,129 Owing to the low deposition temperature of many ALD processes, it has also been demonstrated that ALD could be applied to organic substrates such as polymers [131][132][133] and biomaterials, 134 which provides another degree of flexibility for engineering materials of interest in electrochemical applications.…”