Atomic force microscope cantilever based microcoordinate measuring probe for true three-dimensional measurements of microstructures

Dai, Gaoliang; Wolff, Helmut; Danzebrink, Hans‐Ulrich

doi:10.1063/1.2786881

Cited by 21 publications

(17 citation statements)

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“…On the other hand, the scanning probe microscopes (SPMs) represented by a scanning tunneling microscope (STM) an the atomic force microscope (AFM) can realize the low contact force between the probe tip and the measuring surface since the SPM can maintain the contact force by utilizing the feedback control of the probe-surface distance. Several kinds of SPM have been proposed for nanometer-scale surface observation of the side wall of the microstructures [3,4]. However, since the SPM probes including an STM metal tips and AFM cantilever probes detects the local interaction force from only one direction, it is difficult for the commonly used SPMs to measure the surface form with steep angle and deep groove or inner side of the small holes.…”

Section: Introductionmentioning

confidence: 99%

Dimensional measurement of micrometer-scale structures with a nanopipette ball probe by using shear-force detection

2013

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A nanopipette ball probe has been introduced for the dimensional measurement of the micrometer-scale structures. A hollow glass nanopipette, which is fabricated by thermal pulling process, is used as the shaft of the probe for the detection of the contact. Since the stiffness of the glass nanopipette is lower than that of metal shaft which is similar size of the glass nanopipette, the contact force between the probe and the sample will be able to reduce in comparison with the probe of the metal shaft. The edge of the nanopipette is filled with the thermosetting resin, and a micro glass sphere with 9 mm diameter is fixed on the edge of the nanopipette probe by the thermosetting resin. By attaching the micro sphere at the edge of the nanopipette, the edge of the probe will be possible to maintain a uniform shape in all directions. With regard to the detection of the contact, the method of the shear-force detection has been employed because of its high-sensitivity and nanometer-scale resolution. The resolution and the sensitivity of the nanopipette probe are evaluated, and then surface profile measurement of the microstructure is demonstrated.

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Section: Introductionmentioning

confidence: 99%

Dimensional measurement of micrometer-scale structures with a nanopipette ball probe by using shear-force detection

2013

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“…Sie bietet eine Reihe von Vorteilen wie • die gegenseitige Ergänzung von Funktionalität, physikalischer Wechselwirkung und Genauigkeit; • die Möglichkeit von Messungen mit verschiedenskaliger Auflösung; • die gemeinsame Nutzung von Positioniersystemen, die bei dimensionellen Messungen höchster Genauigkeit normalerweise die teuersten Komponenten des Messgerätes sind, und die damit verbundene Kostenreduzierung. Die Physikalisch-Technische Bundesanstalt (PTB) hat in ihrer Funktion als nationales Metrologieinstitut in Deutschland erfolgreich ein metrologisches Rasterkraftmikroskop ("scanning force microscope" -SFM) mit erweitertem Messbereich (Met-LRSFM) entwickelt und bietet auf seiner Basis seit dem Jahre 2004 Kalibrierdienste auf dem Gebiet der dimensionellen Nanomesstechnik an [5]. Das Met-LRSFM basiert auf dem Positioniersystem der Nanomessmaschine (NMM), die in Zusammenarbeit von TU Ilmenau und der Fa.…”

Section: Introductionunclassified

Rastersondenmetrologie: Vom metrologischen Rasterkraftmikroskop zum Mikro- und NanokoordinatenmessgerätScanning Probe Metrology: From the Metrological SFM to the Micro/Nano CMM

Dai¹,

Bütefisch

Pohlenz

et al. 2009

Tm - Technisches Messen

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Um den vielfältigen Anforderungen auf dem Gebiet der dimensionellen Mikro-und Nanometrologie gerecht zu werden, ist ein Koordinatenmessgerät (KMG) auf der Basis der Nanopositionier-und Nanomessmaschine (NMM) aufgebaut worden. In den vergangenen Jahren sind zwei Typen von taktilen Mikro-/Nanotastern entwickelt und an dieses Gerät angekoppelt worden. Im vorliegenden Beitrag wird über die Entwicklung des Mikro-/Nano-KMG berichtet. Es werden Details zum Design der wichtigsten Komponenten (Positioniersystem, Antastsystem, Software), zu Methoden der TasterCharakterisierung sowie zu Messergebnissen an einem typischen Prüfkörper präsentiert.Schlagwörter: Nano-und Mikrometrologie, Rastersondenmikroskopie, Koordinatenmessgerät, 3D-Taster Scanning Probe Metrology: From the Metrological SFM to the Micro/Nano CMM A coordinate measuring machine (CMM) based on a nano positioning and measuring machine (NMM) has been built up for satisfying various demands on micro and nanoscale dimensional metrology. During the past years two kinds of tactile micro/nano CMM probes have been developed and coupled to the system. In this paper, the development of the micro/nano CMM will be reported. Detailed information on the design ideas concerning the key components of the CMM (positioning stage, probe, software), methods of probe characterization, and measurement results for a typical test artefact are given.

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“…To further expand the AFM technique for full 3D measurements, a type of assembled cantilever probe (ACP) has also been proposed [40]. Compared to the flared tip where the probing element is directly fabricated on the tip, the ACP technique applies microassembling techniques to create a probing stylus.…”

Section: Afm-based 3d Probesmentioning

confidence: 99%

“…To fill this gap, another idea is a type of 3D probe based on the AFM technique. At PTB, we have developed a 3D-AFM [39] and the so-called assembled cantilever probe [40], which is promising to fill this gap.…”

Section: Afm-based 3d Probesmentioning

confidence: 99%

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Overview of 3D Micro- and Nanocoordinate Metrology at PTB

et al. 2016

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Improved metrological capabilities for three-dimensional (3D) measurements of various complex micro-and nanoparts are increasingly in demand. This paper gives an overview of the research activities carried out by the Physikalisch-Technische Bundesanstalt (PTB), the national metrology institute of Germany, to meet this demand. Examples of recent research advances in the development of instrumentation and calibration standards are presented. An ultra-precision nanopositioning and nanomeasuring machine (NMM) has been upgraded with regard to its mirror corner, interferometers and angle sensors, as well as its weight compensation, its electronic controller, its vibration damping stage and its instrument chamber. Its positioning noise has been greatly reduced, e.g., from 1σ = 0.52 nm to 1σ = 0.13 nm for the z-axis. The well-known tactile-optical fibre probe has been further improved with regard to its 3D measurement capability, isotropic probing stiffness and dual-sphere probing styli. A 3D atomic force microscope (AFM) and assembled cantilever probes (ACPs) have been developed which allow full 3D measurements of smaller features with sizes from a few micrometres down to tens of nanometres. In addition, several measurement standards for force, geometry, contour and microgear measurements have been introduced. A type of geometry calibration artefact, referred to as the "3D Aztec artefact", has been developed which applies wet-etched micro-pyramidal marks for defining reference coordinates in 3D space. Compared to conventional calibration artefacts, it has advantages such as a good surface quality, a well-defined geometry and cost-effective manufacturing. A task-specific micro-contour calibration standard has been further developed for ensuring the traceability of, e.g., high-precision optical measurements at microgeometries. A workpiece-like microgear standard embodying different gear geometries (modules ranging from 0.1 mm to 1 mm) has also been developed at the Physikalisch-Technische Bundesanstalt.

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Atomic force microscope cantilever based microcoordinate measuring probe for true three-dimensional measurements of microstructures

Abstract: A pressure gauge based on gas density measurement from analysis of the thermal noise of an atomic force microscope cantilever Rev. Sci. Instrum. 83, 055005 (2012);

Cited by 21 publications

References 5 publications

Dimensional measurement of micrometer-scale structures with a nanopipette ball probe by using shear-force detection

Dimensional measurement of micrometer-scale structures with a nanopipette ball probe by using shear-force detection

Rastersondenmetrologie: Vom metrologischen Rasterkraftmikroskop zum Mikro- und NanokoordinatenmessgerätScanning Probe Metrology: From the Metrological SFM to the Micro/Nano CMM

Overview of 3D Micro- and Nanocoordinate Metrology at PTB

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