2017
DOI: 10.1016/j.ultramic.2017.03.007
|View full text |Cite
|
Sign up to set email alerts
|

Assessment of engineered surfaces roughness by high-resolution 3D SEM photogrammetry

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1

Citation Types

0
8
0

Year Published

2017
2017
2021
2021

Publication Types

Select...
8

Relationship

0
8

Authors

Journals

citations
Cited by 17 publications
(8 citation statements)
references
References 18 publications
0
8
0
Order By: Relevance
“…Next, from the point cloud the continuous surface was recalculated using the Matlab function TriScatteredInterp (x , y , z) . The surface was then reprojected in the z -direction to obtain an elevation map or 2D heights map 7 . Finally, the parameters for rugosity were calculated using the following definitions, with n the number of points of the heights map and z i the height at point i .…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…Next, from the point cloud the continuous surface was recalculated using the Matlab function TriScatteredInterp (x , y , z) . The surface was then reprojected in the z -direction to obtain an elevation map or 2D heights map 7 . Finally, the parameters for rugosity were calculated using the following definitions, with n the number of points of the heights map and z i the height at point i .…”
Section: Methodsmentioning
confidence: 99%
“…Photogrammetry is a non-destructive technique used with optical or SEM images to reconstruct the external shape and texture of an object albeit at the cost of not reconstructing the inner part of the sample 3 6 . In multi-view photogrammetry (MVP), collections of images acquired from multiple viewpoints can be combined using robust algorithms to extract corresponding common features in image pairs and to build a 3D point cloud gathering millions of surface points 5 7 . Then, these points are triangulated to form a 3D mesh of the surface enclosing the volume of the object that is wrapped with the texture of intensities of the original images.…”
Section: Introductionmentioning
confidence: 99%
“…A typical SEM device can tilt the sample from −5° to 70°, which in some cases can be insufficient. However, Gontard and co. [ 44 ] show how to overcome this problem by acquiring a series of images from positive angles, then plane rotating the sample and acquiring tilted images in the opposite direction. A faster method of 3D reconstruction of SEM images was proposed by Sartipi and co. [ 45 ].…”
Section: Introductionmentioning
confidence: 99%
“…They do contain some information related to the third dimension which cannot be extracted in a simple way. Fortunately, a few nondestructive approaches for recovering the third dimension (depth or height) have already been developed, including a model-based library (MBL) SEM method (Villarrubia et al, 2005), a shape-from-shading method (Drzazga et al, 2006), tilt-beam CD-SEM (Su et al, 2000; Zhang et al, 2014) and several variants of SEM 3D reconstruction from two or more viewpoints generated by tilting the sample or the beam (Xie, 2011; Eulitz & Reiss, 2015; Tafti et al, 2015; Gontard et al, 2016, 2017). This article concerns hurdles and opportunities in SEM-based 3D nanometrology using as examples methods from the last group, in which the inputs are two or three images obtained by altering the sample tilt.…”
Section: Introductionmentioning
confidence: 99%