ABSTRACT:The discovery of two-dimensional electron gases (2DEGs) in SrTiO 3 -based heterostructures provides new opportunities for nanoelectronics. Herein, we create a new type of oxide 2DEG by the epitaxial-strain-induced polarization at an otherwise nonpolar perovskite-type interface of CaZrO 3 /SrTiO 3 . Remarkably, this heterointerface is atomically sharp, and exhibits a high electron mobility exceeding 60,000 cm 2 V -1 s -1 at low temperatures. The 2DEG carrier density exhibits a critical dependence on the film thickness, in good agreement with the polarization induced 2DEG scheme.* Corresponding Author. Email:yunc@dtu.dk. Phone: +45 4677 5614.2 KEYWORDS: Complex oxide interfaces, oxide electronics, two-dimensional electron gases, strain induced polarization.Atomically engineered complex oxide heterostructures exhibit a variety of exotic interfacial properties because of strong interactions among the spin, charge, and orbital freedoms as well as lattice vibrations.One particular example is the emergence of high mobility two-dimensional electron gases (2DEGs) at the interface between two oxide insulators, 1,2 one of which is SrTiO 3 (STO), the basis material of oxide electronics. These complex oxide 2DEGs consist of strongly coupled electrons and give rise to a rich set of physical phenomena 3-5 , for example, superconductivity 6,7 , magnetism 8,9 , and tunable metal-insulator transitions on nanoscale, 10,11 providing new opportunities for nanoelectronics and mesoscopic physics. Under optimized conditions, the CZO films deposited by pulsed laser deposition (PLD) can be epitaxially grown on the (001) TiO 2 -terminated STO substrates within a layer-by-layer two-dimensional growth mode, as confirmed by the presence of periodic intensity oscillations of the reflection highenergy electron diffraction (RHEED) pattern monitored in-situ during film growth (Supporting information, Fig.S1). Both RHEED intensity oscillations and sharp RHEED patterns can persist up to a film thickness over 50 unit cells (uc), suggesting high quality film growth. A terrace surface of the grown heterostructure is detected by atomic force microscopy (AFM), which shows a regular step height of 0.4 nm (Fig. 1b). High-resolution X-ray diffraction (XRD) further confirms the epitaxial growth of the (001) We further investigated the atomic structure and interface chemistry of our CZO/STO heterostructures by an aberration corrected scanning transmission electron microscopy (STEM) in combination with electron energy-loss spectroscopy (EELS). Figure 2a shows a high-angle annular dark field (HAADF) STEM image of a CZO/STO sample with the CZO layer of approximately 50 uc (~20 nm). The CZO film is found to be coherent with the STO substrate with no obvious defects or dislocations at the interface. The averaged line profiles (Fig. 2b) Fig.1. In a similar zirconate system of SrZrO 3 /SrTiO 3 , the compressive strain has been reported to result in ferroelectricity in its superlattices. 27 Theoretical calculations by first principle density functional ...