Excimer laser-induced photolysis of gaseous diethyl selenium and diethyl tellurium (C 2 H 5 ) 2 M (M = Se, Te) is controlled by cleavage of both M-C bonds, it yields C 1 -C 4 hydrocarbons (ethene as major product) and results in chemical vapour deposition of selenium films and nanosized tellurium powder. The selenium and tellurium properties were characterized by X-ray photoelectron spectroscopy and Scanning electron Microscopy techniques.