Applications of dynamic techniques for accurate determination of silicon nitride Young's moduli

Hoummady, M.; Farnault, E.; Kawakatsu, Hideki; Masuzawa, T.

doi:10.1109/sensor.1997.613726

Cited by 8 publications

(5 citation statements)

References 7 publications

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“…Previous studies have shown, based on finite element model (FEM) simulations [25][26][27][28][29], that the mechanical stiffness of cMUTs can be significantly modified by residual stresses in the moving part, even if mechanical laws mainly obey to the plate equation. Depending on their sign, residual stresses can be compressive or tensile and so, in opposition or in addition with the return stresses of the plate.…”

Section: Discussion: Comparison With Si Substratementioning

confidence: 99%

“…As explained previously, studies presented are often theoretical and origins of the stresses are rarely discussed. Usually, only the residual mechanical stress of the cMUT membrane is measured in order to investigate the initial deflection and the Young's modulus extracted [27,28]. However, to ensure process reproducibility and better control of the device fabricated, it is important to identify process steps which have a significant impact on residual stresses.…”

Section: Residual Stress Monitoring Of the Low Temper Ature Fabricati...mentioning

confidence: 99%

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Low temperature capacitive micromachined ultrasonic transducers (cMUTs) on glass substrate

Bahette¹,

Michaud²,

Certon³

et al. 2016

J. Micromech. Microeng.

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The possibility of fabricating capacitive micromachined ultrasonic transducers (cMUTs) on glass substrates may open the way for new fields of application in which the transparency of the substrate is advantageous. In this study, we demonstrate that a low-temperature process can be carried out to achieve cMUTs on glass substrates. Limited to temperatures lower than 400 °C, the process is based on the use of nickel as a sacrificial layer. The cMUT electromechanical behavior is studied and the performance compared to those obtained with silicon substrates. The cMUTs fabricated on glass substrate showed performance comparable with the Si ones. A slight shift in the resonance frequency and collapse voltage was observed. It is shown that these differences arise from the residual mechanical stresses in the substrate.

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Section: Discussion: Comparison With Si Substratementioning

confidence: 99%

Section: Residual Stress Monitoring Of the Low Temper Ature Fabricati...mentioning

confidence: 99%

Low temperature capacitive micromachined ultrasonic transducers (cMUTs) on glass substrate

Bahette¹,

Michaud²,

Certon³

et al. 2016

J. Micromech. Microeng.

View full text Add to dashboard Cite

show abstract

“…This simultaneous detection enables us to measure the motion at the end of the cantilever within two degrees of freedom, i.e. normal displacement and displacement slope [13]. In the case of higher harmonic excitation, the method allows the characterization of displacement and mode order with high accuracy.…”

Section: Methodsmentioning

confidence: 99%

Nonlinear tip-sample interactions affecting frequency responses of microcantilevers in tapping mode atomic force microscopy

Hoummady

Rochat

Farnault

1998

Applied Physics A: Materials Science & Processing

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Tapping mode atomic force microscopy is receiving a great deal of interest because of its ability to image compliant materials as well as to overcome adhesion forces. In this operation mode, the vibration amplitude of the cantilever is much higher than the equilibrium separation between tip and sample. For our experiments, a silicon microcantilever and a freshly cleaved mica sample were used. Frequency responses were measured for different values of equilibrium separation distance. Experimental results revealed a drastic decrease in vibration amplitude and a large shift of resonant frequency to higher values. This frequency shift and amplitude damping depend drastically on the equilibrium position with respect to the free oscillation amplitude of the cantilever. A model taking into account the attractive Van der Waals force as well as repulsive contact force was used. Parameters such as position of the tip, force acting during intermittent contact and frequency responses have been calculated. Good agreement is obtained and the relevant parameters involved in tapping mode are discussed.Since its invention, atomic force microscopy (AFM) [1] has been a promising tool for investigating many kinds of surfaces of conductive and nonconductive materials. During the last few years, different operating principles have been developed especially for investigating compliant materials such as biological cells [2] and polymers [3] for which acting forces should be controlled in order to avoid sample distortion and damage. For these kinds of materials contact mode has some drawbacks; in addition to possible sample damage, other forces such as adhesion force, shear force during scanning, and capillary force can act at the same time. All these factors have led to development of other operation modes such as non-contact mode AFM and recently the tapping mode [4][5][6].to detect long-range interaction [7]. Good resolution can be obtained when the rest position of the cantilever is close to the sample and the vibration amplitude is small enough. In ambient environment, some parasitic interactions can be observed, for example hydrodynamic interaction, capillary force, or sticking effect [8].In tapping operation mode, the vibration amplitude is large enough (in the range of 100 nm). Equilibrium separation between tip and sample is much smaller than the free cantilever vibration amplitude allowing for an intermittent tip/sample contact once per cycle. Large amplitudes combined with large repulsive contact forces, provide the cantilever with enough energy to overcome capillary and adhesion forces. Also, intermittent short contact can be compliant enough to avoid possible damage to the sample.The mechanisms involved in tapping operation mode have been investigate recently [9][10][11][12]. During a vibration cycle, the tip is subject to attractive and repulsive forces acting at different tip/sample positions. The attractive force is quite weak in comparison to the stronger repulsive force, which can increase the cantilever resonance freque...

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“…Our four-frame phase stepping approach involves recording four interferograms I, '2, 13 and 14 mutually phase shifted by rc/2 for the static and resonance states. Dividing the computational results (I -J3)2 + ('2 - 14) obtained for the vibrating and static object states we get 12:…”

Section: Testing Silicon Elements By Time-average Interferometry Withmentioning

confidence: 99%

<title>Conventional and fiber optics interferometry for vibration mode analysis</title>

et al. 2004

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The visualization and analysis methods for studying vibration modes of macro and micro scale objects with spectrally reflecting and scattering surfaces, developed at the Institute of Micromechanics and Photonics of the Warsaw University of Technology, are presented. Silicon technology prepared microspecimens (AFM cantilevers and active PZT micromembranes) are investigated using two-beam time-average interferometry. Vibration modes of flat and non-flat surface microelements are displayed using four and five-frame temporal phase stepping methods. The calculated contrast of vibrating object interferograms provides the information on the vibration amplitude. Scattering surface objects are studied by time-average fiber-optics digital speckle pattern interferometry (DSPI) with heterodyning. Sinusoidal phase modulation introduced at the object vibration frequency enables quantitative analysis of the amplitude and phase of sinusoidal type vibrations. Laser diode modulation and/or single mode fiber stretching is applied for that purpose. For low vibration amplitudes (a<2J2O) the method using linear approximation of the zero order Bessel function provides an automatic analysis tool for quantitative estimation ofthe vibration modes.

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Applications of dynamic techniques for accurate determination of silicon nitride Young's moduli

Cited by 8 publications

References 7 publications

Low temperature capacitive micromachined ultrasonic transducers (cMUTs) on glass substrate

Low temperature capacitive micromachined ultrasonic transducers (cMUTs) on glass substrate

Nonlinear tip-sample interactions affecting frequency responses of microcantilevers in tapping mode atomic force microscopy

<title>Conventional and fiber optics interferometry for vibration mode analysis</title>

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