Application of a commercially available displacement measuring interferometer to line scale measurement and uncertainty of measurement

Bahrawi, M.; Farid, Niveen

doi:10.1007/s12647-010-0025-7

Cited by 4 publications

(4 citation statements)

References 1 publication

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“…Experimental results show an expanded uncertainty of about 0.7 nm + 0.1× 10 −3 L. The calibrated actuator is then used as a transfer standard at the nanometer level, both for testing the nonlinearity of the laser interferometer and for calibrating the linear variable differential transformer probe (Line Standards) of the National Institute of Standards (Egypt), [10][11][12].…”

Section: Calibration Using Optical Interferometrymentioning

confidence: 99%

Nanometer positioning accuracy over a long term traveling stage based on heterodyne interferometry

Naeim¹,

Khodier²

2012

Int. J. Metrol. Qual. Eng.

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Abstract. In order to achieve nanometer accuracy, metrologists need to identify the sources of error and develop solutions to eradicate or minimize their effects. A stabilized low power dual-frequency laser heterodyne interferometer (ZMI-1000A) designed to measure linear and angular displacement with nominal measurement resolution 1.24 nm and 0.0025 arcsec, respectively, is used to achieve measurement of displacements over different travelling axes by comparison with the electronically reference measurements of the stage over wide range 500 mm. The repeatability and reversal error of linear stage over the working distance have agreed opto-electronically and the positioning uncertainty been reduced. A multivariable framework was implemented for the x-axis due to the cross coupling between the forward and backward course of the linear stage. Thermal error reduction is achieved using environmental temperature control (20 ± 0.2 • C) to help reduce thermal errors.

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Section: Calibration Using Optical Interferometrymentioning

confidence: 99%

Nanometer positioning accuracy over a long term traveling stage based on heterodyne interferometry

Naeim¹,

Khodier²

2012

Int. J. Metrol. Qual. Eng.

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“…In length and dimensional metrology measurements, the secondary standard is a stabilized wavelength laser. The displacement measuring interferometer (DMI) is made up of a heterodyne stabilized wavelength laser and optical components, as well as a motorized moving stage and a magnifying microscope [11]. Because it relies on a stable wavelength laser to measure and calibrate the position, inner diameter and depth of the planned holes on steel and aluminum reference blocks, DMI is the most accurate, precise and high-resolution technique.…”

Section: Introductionmentioning

confidence: 99%

Evaluation of new designed reference blocks for calibration and NDT by optical and ultrasonic techniques

Barakat,

Abdelwahab,

Abdallah

2022

Metrology and Measurement Systems

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Reference blocks are required for ultrasonic calibration and non-destructive testing (NDT). There are already in existence sets of reference blocks constructed according to American Society for Testing and Materials standards, but as the industry evolves, we need more reference blocks with varied designs. In this study, two reference blocks of steel and aluminum are constructed. These blocks have several sets of flat bottom holes (FBH) with different diameters (0.5, 1, 1.5, 2 and 2.5 mm), angles (45 • and 90 • ) and placements. The novel constructed reference blocks are evaluated using the ultrasonic and a displacement measuring interferometer (DMI). They allow for detailed FBH characterization in terms of defining their location, diameter, depth and so on. The two techniques show consistency in the majority of the outcomes. The expanded uncertainty of readings is found to be ±1.4 μm, according to DMI data. The findings show that the newly constructed blocks could be ideal for evaluating a variety of calibration factors including transducer sensitivity, dead zone, defect size, and depth. Furthermore, they can be used in NDT in various industries such as petroleum pipe production, steel manufacturing and so on.

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“…For Fizeau interferometer the measurement uncertainty depends on two major kinds of sources. One is uncertainty due to inteferometric measurements, which involves phase shift errors, environmental conditions and camera non linearity [6]. The other source is the uncertainty due to reference flat.…”

Section: Introductionmentioning

confidence: 99%

Evaluation of Measurement Uncertainty for Absolute Flatness Measurement by Using Fizeau Interferometer with Phase-Shifting Capability

Moona

Sharma

Kiran

et al. 2014

MAPAN

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It is important to precisely measure flatness of the optical flats, as many industries use these as reference standards to ensure the quality of precision measurements and fabricated components. This paper describes identification of sources of error and measurement uncertainty evaluation for three flat test. Three flat test is used for absolute flatness measurement of optical flats, with the help of Fizeau interferometer (VerifireXP/D, with phase shift interferometry) established recently at National Physical Laboratory, India (NPL-I). The absolute profile of reference flat with higher accuracy can be determined using liquid level reference but liquid flat reference is more difficult to realize practically. Therefore three flat test is frequently adopted in standard interferometric measurements and traceability of this test can also be established by using a traceable laser head. This paper describes three flat method in detail along with observations and evaluation of measurement uncertainty as per ISO GUM is also done. Factors contributing to uncertainty of measurement of surface flatness have been indentified and detailed evaluation of uncertainty in measurements has been reported here.

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Application of a commercially available displacement measuring interferometer to line scale measurement and uncertainty of measurement

Cited by 4 publications

References 1 publication

Nanometer positioning accuracy over a long term traveling stage based on heterodyne interferometry

Nanometer positioning accuracy over a long term traveling stage based on heterodyne interferometry

Evaluation of new designed reference blocks for calibration and NDT by optical and ultrasonic techniques

Evaluation of Measurement Uncertainty for Absolute Flatness Measurement by Using Fizeau Interferometer with Phase-Shifting Capability

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