“…Recently, InO x -based amorphous oxide semiconductors such as In 2 O 3 , 7,8 InZnO, 9,10 Sn-InZnO, 11 Hf-InZnO, 12,13 Si-InZnO, 3,14 Zr-InZnO, 15,16 InGaZnO (IGZO), 17 InWO, 18 and InSiO 19,20 have been investigated in low-temperature processes to improve device performance. Because Zn-containing oxide semiconductors are sensitive to moisture in the atmosphere, 21 a ZnO-based TFT that is fabricated at a low temperature is difficult to use in stable operation.…”