Using all-atom simulation of vapor deposition, we theoretically investigate how the molecular orientation depends on various factors such as the substrate temperature, molecular shape, and material composition.
Using first‐principles calculation, we investigate the nature of oxygen vacancy (VO), namely shallow versus deep, in the amorphous oxide semiconductor InGaZnO4 (a‐IGZO), which has not been fully clarified despite its technological importance. Oxygen‐deficient amorphous models are generated through the hybrid functional molecular dynamics (MD) simulations that allow for finding stable VO configurations while minimizing computational approximations. From eight independent models, we consistently find that VO serves as the shallow donor, increasing the Fermi level above the conduction band minimum. For comparison purpose, we also generate deep VO models by charging the system during MD simulations. It is found that deep VO is higher in the formation energy than shallow VO, confirming that shallow VO is the preferred type of oxygen vacancies in a‐IGZO.
To enlighten microscopic origin of visible-light absorption in transparent amorphous semiconducting oxides, the intrinsic optical property of amorphous InGaZnO4 is investigated by considering dipole transitions within the quasiparticle band structure. In comparison with the crystalline InGaZnO4 with the optical gap of 3.6 eV, the amorphous InGaZnO4 has two distinct features developed in the band structure that contribute to significant visible-light absorption. First, the conduction bands are down-shifted by 0.55 eV mainly due to the undercoordinated In atoms, reducing the optical gap between extended states to 2.8 eV. Second, tail states formed by localized oxygen p orbitals are distributed over ∼0.5 eV near the valence edge, which give rise to substantial subgap absorption. The fundamental understanding on the optical property of amorphous semiconducting oxides based on underlying electronic structure will pave the way for resolving instability issues in recent display devices incorporating the semiconducting oxides.
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