Annealing properties of open volumes in strained SiN films studied by monoenergetic positron beams

Uedono, Akira; Ito, Kyoji; Narumi, T.; Sometani, Mitsuru; Yamabe, Kikuo; Miyagawa, Yoshihiro; Murata, Tatsunori; Honda, K.; Hattori, Nobusuke; Matsuura, M.; Asai, Keisuke; Ohdaira, Toshiyuki; Suzuki, Ryoichi

doi:10.1063/1.2781571

Cited by 4 publications

(1 citation statement)

References 18 publications

(17 reference statements)

Supporting

Mentioning

Contrasting

Order By: Relevance

“…This is proposed as a visual tool to compound molecular and structural information for early stage prostate cancer detection. 40 An additional promise of endogenous expression, where contrast reagents are engineered to interrogate endogenously expressed proteins or nucleic acids, is the combination of imaging with therapeutic reagents such that they can both be optimized in an iterative fashion. The effect of therapeutic reagents can give rise to modified signals which in turn can be identified with the use of different contrast reagents.…”

Section: Iiia Future Steps In MI Technologymentioning

confidence: 99%

Molecular imaging and the unification of multilevel mechanisms and data in medical physics

2008

View full text Add to dashboard Cite

Molecular imaging (MI) constitutes a recently developed approach of imaging, where modalities and agents have been reinvented and used in novel combinations in order to expose and measure biologic processes occurring at molecular and cellular levels. It is an approach that bridges the gap between modalities acquiring data from high (e.g., computed tomography, magnetic resonance imaging, and positron-emitting isotopes) and low (e.g., PCR, microarrays) levels of a biological organization. While data integration methodologies will lead to improved diagnostic and prognostic performance, interdisciplinary collaboration, triggered by MI, will result in a better perception of the underlying biological mechanisms. Toward the development of a unifying theory describing these mechanisms, medical physicists can formulate new hypotheses, provide the physical constraints bounding them, and consequently design appropriate experiments. Their new scientific and working environment calls for interventions in their syllabi to educate scientists with enhanced capabilities for holistic views and synthesis.

show abstract

Section: Iiia Future Steps In MI Technologymentioning

confidence: 99%

Molecular imaging and the unification of multilevel mechanisms and data in medical physics

2008

View full text Add to dashboard Cite

show abstract

Material design of plasma-enhanced chemical vapour deposition SiCH films for low-kcap layers in the further scaling of ultra-large-scale integrated devices-Cu interconnects

Shimizu

Nagano²,

Uedono

et al. 2013

Science and Technology of Advanced Materials

View full text Add to dashboard Cite

Cap layers for Cu interconnects in ultra-large-scale integrated devices (ULSIs), with a low dielectric constant (k-value) and strong barrier properties against Cu and moisture diffusion, are required for the future further scaling of ULSIs. There is a trade-off, however, between reducing the k-value and maintaining strong barrier properties. Using quantum mechanical simulations and other theoretical computations, we have designed ideal dielectrics: SiCH films with Si–C2H4–Si networks. Such films were estimated to have low porosity and low k; thus they are the key to realizing a cap layer with a low k and strong barrier properties against diffusion. For fabricating these ideal SiCH films, we designed four novel precursors: isobutyl trimethylsilane, diisobutyl dimethylsilane, 1, 1-divinylsilacyclopentane and 5-silaspiro [4,4] noname, based on quantum chemical calculations, because such fabrication is difficult by controlling only the process conditions in plasma-enhanced chemical vapor deposition (PECVD) using conventional precursors. We demonstrated that SiCH films prepared using these newly designed precursors had large amounts of Si–C2H4–Si networks and strong barrier properties. The pore structure of these films was then analyzed by positron annihilation spectroscopy, revealing that these SiCH films actually had low porosity, as we designed. These results validate our material and precursor design concepts for developing a PECVD process capable of fabricating a low-k cap layer.

show abstract

Hydrogen effects on the thermal conductivity of delocalized vibrational modes in amorphous silicon nitride (a−SiNx:H)

Braun

King

Hoglund

et al. 2021

Phys. Rev. Materials

View full text Add to dashboard Cite

Annealing properties of open volumes in strained SiN films studied by monoenergetic positron beams

Cited by 4 publications

References 18 publications

Molecular imaging and the unification of multilevel mechanisms and data in medical physics

Molecular imaging and the unification of multilevel mechanisms and data in medical physics

Material design of plasma-enhanced chemical vapour deposition SiCH films for low-kcap layers in the further scaling of ultra-large-scale integrated devices-Cu interconnects

Hydrogen effects on the thermal conductivity of delocalized vibrational modes in amorphous silicon nitride (a−SiNx:H)

Contact Info

Product

Resources

About