2021
DOI: 10.1103/physrevmaterials.5.035604
|View full text |Cite
|
Sign up to set email alerts
|

Hydrogen effects on the thermal conductivity of delocalized vibrational modes in amorphous silicon nitride (aSiNx:H)

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1

Citation Types

0
3
0

Year Published

2022
2022
2024
2024

Publication Types

Select...
6
1

Relationship

0
7

Authors

Journals

citations
Cited by 12 publications
(3 citation statements)
references
References 104 publications
0
3
0
Order By: Relevance
“…The thermal conductivity of a-SiN has been targeted by several former publications for a variety of deposition method, stoichiometry, density, and H-content; for a review see Ref. [38]. For a stoichiometry between 1 and 1.1 and a density in the range [2.9:3.1] g cm −3 , close to the conditions of the present study, the in-plane thermal conductivity of non-hydrogenated a-SiN is equal to 2.5 to 3.7 W K −1 m −1 for film thicknesses between 50 nm and 4 µm [11,[39][40][41].…”
Section: B Thermal Conductivitymentioning
confidence: 99%
“…The thermal conductivity of a-SiN has been targeted by several former publications for a variety of deposition method, stoichiometry, density, and H-content; for a review see Ref. [38]. For a stoichiometry between 1 and 1.1 and a density in the range [2.9:3.1] g cm −3 , close to the conditions of the present study, the in-plane thermal conductivity of non-hydrogenated a-SiN is equal to 2.5 to 3.7 W K −1 m −1 for film thicknesses between 50 nm and 4 µm [11,[39][40][41].…”
Section: B Thermal Conductivitymentioning
confidence: 99%
“…Aluminum or aluminum oxide [22][23][24][25] Gold [26][27][28] Silver [29][30][31] Titanium oxide [32][33][34] Silicon nitride [35][36][37] Glass membranes [38][39][40] Organic Cellulose nitrate, nitrocellulose, cellulose acetate…”
Section: Inorganicmentioning
confidence: 99%
“…This type of membrane can be of two types; (i) Organic membranes covered by a thin layer of inorganic material, usually, a conductor such as gold [31,[40][41][42][43][44][45]; and (ii) Membranes synthesized by sol-gel methods to obtain structures of inorganic nanoparticles with polymer chains [13,26,30,46]. Finally, composite membranes are multiple layers of membranes that are stacked together side-to-side or vertically to comprise a whole sensor [32][33][34][35][36][37][38]47].…”
Section: Inorganicmentioning
confidence: 99%