Annealing effect on the chemical structure of diamondlike carbon

Abstract

Electron cyclotron resonance deposition, structure, and properties of oxygen incorporated hydrogenated diamondlike amorphous carbon films J. Appl. Phys. 96, 5456 (2004); 10.1063/1.1804624Effects of thermal annealing on the structural, mechanical, and tribological properties of hard fluorinated carbon films deposited by plasma enhanced chemical vapor depositionThe effect of annealing in an ultrahigh vacuum on the chemical structure of diamondlike carbon ͑DLC͒ was investigated using photoelectron spectroscopy, thermal desorption spectroscopy, electrical resistivity, and micro-Raman spectroscopy measurements. The line shapes of the C 1s photoelectron spectra depended on annealing temperature. The relative intensities of four chemical components in the spectra were quantitatively evaluated: sp 3 carbon with carbon-carbon bonds ͑C-C sp 3 carbon͒, sp 2 carbon with carbon-carbon bonds ͑C-C sp 2 carbon͒, sp 2 carbon with hydrogen-carbon bonds ͑H-C sp 2 carbon͒, and sp 3 carbon with hydrogen-carbon bonds ͑H-C sp 3 carbon͒. The variation of the ratio of the components demonstrated that hydrogen in DLC is emitted to the outside in between 450 and 600°C, and the remaining DLC is graphized above 600°C. The increase in the asymmetry of the C 1s spectra and the decrease in the electrical resistivity of the DLC film with annealing temperature agree with the picture that the H-C bonds in DLC produces large free spaces in the structure, which inhibit conductive routes and lead to high electrical resistivity.

Long-term H-release of hard and intermediate between hard and soft amorphous carbon evidenced by in situ Raman microscopy under isothermal heating

“…The D band also narrows and its height increases. According to previous studies [2,13,14], these evolutions reveal the organization of the material, i.e. a loss of C(sp 3 ) and increasing aromatization.…”

Advanced spectroscopic analyses on a:C-H materials: Revisiting the EELS characterization and its coupling with multi-wavelength Raman spectroscopy

“…The high stability of these materials makes them very suitable for a large range of applications including the use as protecting coatings for data storage devices in order to preserve both magnetic discs and recording heads from corrosion and wear [3][4][5]. Recently there is a renewed interest for these materials as they exhibits a superlow friction coefficient and long wear life in ultra-high vacuum which makes them one of the most promising solid lubricant coating candidate for aerospace applications [6][7][8][9][10].…”

Hydrogen stability in hydrogenated amorphous carbon films with polymer-like and diamond-like structure

“…6,12 However, the structure and properties of the a-C:H materials are strongly affected by heat treatment. 13,14 The thermally induced changes in the a-C:H film structure are crucial for these practical applications and the thermal stability of a-C:H films with different microstructure has therefore been studied repeatedly over the last two decades. For this purpose, many different characterization techniques such as Raman spectroscopy, infrared absorption, differential scanning calorimetry/thermogravimetry, x-ray photoelectron spectroscopy, Auger electron spectroscopy, high resolution transmission electron microscopy, elastic recoil detection analysis (ERDA), and thermal desorption have been employed.…”