2023
DOI: 10.1002/jnm.3106
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Analytical investigation of a triple surrounding gate germanium source metal–oxide–semiconductor field‐effect transistor with step graded channel for biosensing applications

Abstract: This paper proposes a compact analytical model and comprehensively investigates the biosensing performance of a novel dielectric modulated triple surrounding gate germanium source metal–oxide–semiconductor field‐effect transistor with a step graded channel. Solving the 2D Poisson's equation yields an analytical expression of threshold voltage, channel potential, drain current and sub threshold swing. The sensitivity variation in the biosensor has been thoroughly studied by varying different device parameters t… Show more

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Cited by 23 publications
(13 citation statements)
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References 75 publications
(87 reference statements)
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“…By following these steps, the quartic‐step graded channel can be successfully fabricated in the SG‐MOSFET, providing the desired doping profile for improved device performance. The fabrication of a similar step‐graded profile has been shown recently by Amit et al 41 and Okumura et al 42 …”
Section: Device Structure Simulation and Fabricationmentioning
confidence: 82%
See 1 more Smart Citation
“…By following these steps, the quartic‐step graded channel can be successfully fabricated in the SG‐MOSFET, providing the desired doping profile for improved device performance. The fabrication of a similar step‐graded profile has been shown recently by Amit et al 41 and Okumura et al 42 …”
Section: Device Structure Simulation and Fabricationmentioning
confidence: 82%
“…By following these steps, the quartic-step graded channel can be successfully fabricated in the SG-MOSFET, providing the desired doping profile for improved device performance. The fabrication of a similar step-graded profile has been shown recently by Amit et al 41 and Okumura et al 42 To form the source and drain contacts, a horizontal tube-shaped furnace can be used with a forming gas composition consisting of 90% N 2 and 10% H 2 , allowing for silicidation. 43 SiO 2 layer can be mounted on the cylindrical surface using oxide mandrill patterning.…”
Section: First Dopingmentioning
confidence: 99%
“…The graded channel lowers the short channel effects (SCEs) and improves the drive current of the device without scaling it [8,86]. Using the tri-step graded doping causes a sudden change of potential across the channel, and this sharp change induces a larger electric field than the non-step graded doping [87]. This critical electric field imparts a more vital force on the charge carriers moving from the source to the drain, which improves the carrier transportation mechanism in a graded channel [88].…”
Section: Resultsmentioning
confidence: 99%
“…1d. Initial steps in the fabrication 56 of the biosensor include substrate preparation, silicon epitaxial growth, sacrificial layer deposition, gate dielectric deposition 32,57 using methods like thermal oxidation or chemical vapor deposition (CVD), gate electrode deposition using methods like PVD or CVD 58 and Gate All Around nanowire FET formation, 59,60 which will function as the biosensor's sensing element. 58…”
Section: Device Architecture and Simulation Environmentmentioning
confidence: 99%