Analysis of the quality factor of AlN-actuated micro-resonators in air and liquid

Manzaneque, Tomás; Hernando, J.; Rodríguez-Aragón, Licesio J.; Ababneh, A.; Seidel, H.; Schmid, U.; Sánchez‐Rojas, J. L.

doi:10.1007/s00542-009-1003-2

Cited by 32 publications

(25 citation statements)

References 16 publications

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“…Among the different modes of vibration, it is already well established to use in-plane modes for an efficient performance in liquid media [7,8]. On the other hand, out-of-plane modes are considered to yield lower quality factors and may be less suitable for such application scenarios [9,10]. However, especially the roof-tile shaped modes have recently demonstrated their suitability for liquid media applications, due to high quality factors and reasonably low resonant frequencies [11,12].…”

Section: Introductionmentioning

confidence: 99%

A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity–Density Sensors

Ruiz-Díez

Toledo

Hernando-García

et al. 2019

Sensors

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Cantilever resonators based on the roof tile-shaped modes have recently demonstrated their suitability for liquid media monitoring applications. The early studies have shown that certain combinations of dimensions and order of the mode can maximize the Q-factor, what might suggest a competition between two mechanisms of losses with different geometrical dependence. To provide more insight, a comprehensive study of the Q-factor and the resonant frequency of these modes in microcantilever resonators with lengths and widths between 250 and 3000 µm and thicknesses between 10 and 60 µm is presented. These modes can be efficiently excited by a thin piezoelectric AlN film and a properly designed top electrode layout. The electrical and optical characterization of the resonators are performed in liquid media and then their performance is evaluated in terms of quality factor and resonant frequency. A quality factor as high as 140 was measured in isopropanol for a 1000 × 900 × 10 µm3 cantilever oscillating in the 11th order roof tile-shaped mode at 4 MHz; density and viscosity resolutions of 10−6 g/mL and 10−4 mPa·s, respectively are estimated for a geometrically optimized cantilever resonating below 1 MHz.

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Section: Introductionmentioning

confidence: 99%

A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity–Density Sensors

Ruiz-Díez

Toledo

Hernando-García

et al. 2019

Sensors

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“…From these output characteristics, the resonance frequency f res and Q -factor Q are determined using the Butterworth-van Dyke equivalent circuit, in combination with a Levenberg-Marquardt algorithm [ 31 ]. Once f res and Q are obtained for all solutions ( N 1 – N 9 and S 1 – S 9 ), an evaluation procedure taken from [ 32 ] is used to determine the actual density ρ f using:

…”

Section: Methodsmentioning

confidence: 99%

Potential of Piezoelectric MEMS Resonators for Grape Must Fermentation Monitoring

et al. 2017

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In this study grape must fermentation is monitored using a self-actuating/self-sensing piezoelectric micro-electromechanical system (MEMS) resonator. The sensor element is excited in an advanced roof tile-shaped vibration mode, which ensures high Q-factors in liquids (i.e., Q ~100 in isopropanol), precise resonance frequency analysis, and a fast measurement procedure. Two sets of artificial model solutions are prepared, representing an ordinary and a stuck/sluggish wine fermentation process. The precision and reusability of the sensor are shown using repetitive measurements (10 times), resulting in standard deviations of the measured resonance frequencies of ~0.1%, Q-factor of ~11%, and an electrical conductance peak height of ~12%, respectively. With the applied evaluation procedure, moderate standard deviations of ~1.1% with respect to density values are achieved. Based on these results, the presented sensor concept is capable to distinguish between ordinary and stuck wine fermentation, where the evolution of the wine density associated with the decrease in sugar and the increase in ethanol concentrations during fermentation processes causes a steady increase in the resonance frequency for an ordinary fermentation. Finally, the first test measurements in real grape must are presented, showing a similar trend in the resonance frequency compared to the results of an artificial solutions, thus proving that the presented sensor concept is a reliable and reusable platform for grape must fermentation monitoring.

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“…The resonating devices were fabricated following the procedure reported in detail in Manzaneque et al (2010). For the analyses presented in this work, cantilevers with different geometrical dimensions were used.…”

Section: Materials and Device Fabricationmentioning

confidence: 99%

“…Piezoelectric materials such as lead zirconate titanate (PZT) (Shin et al 2008;Deshpande and Saggere 2007) and zinc oxide (ZnO) ) are commonly used for the fabrication of piezoelectric MEMS. Recently sputterdeposited polycrystalline aluminium nitride (AlN) starts also to be a candidate (Hernando-García et al 2010;Cimalla et al 2007;Andrei et al 2008). In contrast to PZT and ZnO, polycrystalline AlN is fully compatible with the technological process of silicon technology, what facilitates its integration in silicon-based devices.…”

Section: Introductionmentioning

confidence: 96%

Resonantly excited AlN-based microcantilevers for immunosensing

et al. 2012

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The purpose of this work is to study the performance of resonantly driven microcantilevers excited with a piezoelectric aluminium nitride thin film as a mass sensor for the detection of interactions in the field of immunosensing. Two cantilevers with different width (i.e. 300 and 200 lm), but constant length and thickness of 300 and 20 lm were considered. The figures of merit of these structures, such as the mass sensitivity and the limit of mass detection, were determined. According to the results obtained, a cantilever being 300 9 200 lm 2 in size and a high frequency mode was the best combination to detect antibody/antigen interactions. The previous combination was applied to detect the affinity between rabbit immunoglobulin G (IgG) and the complementary anti-rabbit IgG produced in goat. The binding was registered as a shift of the resonance frequency of the mode under investigation and the correlation between the added mass and the measured shift is analysed.

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Analysis of the quality factor of AlN-actuated micro-resonators in air and liquid

Cited by 32 publications

References 16 publications

A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity–Density Sensors

A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity–Density Sensors

Potential of Piezoelectric MEMS Resonators for Grape Must Fermentation Monitoring

Resonantly excited AlN-based microcantilevers for immunosensing

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