This Letter reports on an advanced out-of-plane bending mode for aluminum-nitride (AlN)-actuated cantilevers. Devices of different thickness were fabricated and characterized by optical and electrical measurements in air and liquid media having viscosities up to 615 cP and compared to the classical out-of-plane bending and torsional modes. Finite element method eigenmode analyses were performed showing excellent agreement with the measured mode shapes and resonance frequencies. Quality factors (Q-factor) and the electrical behavior were evaluated as a function of the cantilever thickness. A very high Q-factor of about 197 was achieved in deionized water at a low resonance frequency of 336 kHz, being up to now, the highest quality factor reported for cantilever sensors in liquid media. Compared to the quality factor of the common fundamental out-of-plane bending mode, a 5 times higher Q-factor was achieved. Furthermore, the strain related conductance peak of the roof tile-shaped mode is superior. Compared to any out-of-plane bending mode, this combination of most beneficial properties is unique and make this mode superior for a large variety of resonator-based sensing applications.
Dry eye syndrome is a highly prevalent disease of the ocular surface characterized by an instability of the tear film. Traditional methods used for the evaluation of tear film stability are invasive or show limited repeatability. Here we propose a new non-invasive fully automated approach to measure tear film thickness based on spectral domain optical coherence tomography and on an efficient delay estimator. Silicon wafer phantom were used to validate the thickness measurement. The technique was applied in vivo in healthy subjects. Series of tear film thickness maps were generated, allowing for the visualization of tear film dynamics. Our results show that the in vivo central tear film thickness measurements are precise and repeatable with a coefficient of variation of about 0.65% and that repeatable tear film dynamics can be observed. The presented approach could be used in clinical setting to study patients with dry eye disease and monitor their treatments.
We report the use of two AlN-based piezoelectric microresonators for the monitoring of density and viscosity of liquids and its application to detect lubricant oil dilution with diesel fuel. Two devices designed to resonate in the 4th-order roof tile-shaped vibration mode, but with two different anchor schemes, were fabricated and characterized. Interface circuits were designed to convert the one-port impedance into a resonant two-port transfer function. This allowed us to implement a phase locked loop (PLL)-based oscillator circuit based on the resonators, the interface circuit and a commercial lock-in amplifier. Our results demonstrate the performance of the resonators in fluids having viscosities up to 500 mPa · s. The performance of the sensors in terms of sensitivity and resolution are compared for both anchor configurations.
A new experimental device for normal spectral emissivity measurements of coatings in the infrared spectral range from 1.38 μm to 26 μm and in the temperature range from 550 K to 1250 K is presented. A Fourier transform infrared spectrometer (FTIR) is used for the detection of sample and blackbody spectral radiation. Sample heating is achieved by a fiber laser with a scanning head. Surface temperature is measured by two methods. The first method uses an infrared camera and a reference coating with known effective emissivity, the second method is based on the combination of Christiansen wavelength with contact and noncontact surface temperature measurement. Application of the method is shown on the example of a high-temperature high-emissivity coating. Experimental results obtained with this apparatus are compared with the results performed by a direct method of Laboratoire National d’Essais (LNE) in France. The differences in the spectra are analyzed.
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