Resonantly excited AlN-based microcantilevers for immunosensing

Oliver, Miguel; Hernando-García, J.; Ababneh, A.; Seidel, H.; Schmid, U.; Andrés, J. P.; Pobedinskas, Paulius; Haenen, Ken; Sánchez‐Rojas, J. L.

doi:10.1007/s00542-012-1444-x

Cited by 6 publications

(3 citation statements)

References 25 publications

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“…the resonance frequency shift. An earlier study investigated the performance of the roof tile-shaped mode for immunosensing, but did not consider the position-dependent mass responsivity of such modes (Oliver et al 2012). Due to the 2D mode shape, the mass responsivity depends on the position of the additional mass along the width and length of the resonator.…”

Section: Introductionmentioning

confidence: 99%

Position-dependent mass responsivity of silicon MEMS cantilevers excited in the fundamental, two-dimensional roof tile-shaped mode

Patocka

Schneider

Dörr

et al. 2019

J. Micromech. Microeng.

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The potential of a special class of eigenmodes of microcantilevers, the so-called roof tileshaped modes, is investigated for resonant mass sensing. Due to the 2D shape of vibration, the mass responsivity (resonance frequency shift per unit mass change) of these modes depends on the position along the length and width of the cantilever. This is in contrast to the commonly used 1D eigenmodes, where the mass responsivity is only dependent on one spatial variable. We mapped the position-dependent mass responsivity of the fundamental roof tile-shaped mode by placing silicon dioxide microbeads as test mass on defined positions across the cantilever surface and measuring the corresponding shift in resonance frequency. The results show very good agreement with finite element analyses and are used to verify an analytic expression for the position-dependent mass responsivity. This expression allows for the calculation of the mass responsivity of an arbitrary point on the cantilever surface. A mass responsivity of 24 Hz ng −1 was found at the point of maximum oscillation amplitude at the free end of the cantilever, which rapidly decreases towards the nodal lines of the vibration. The 2D spatial distribution of the mass responsivity is discussed in this paper, which has to be considered in the design of high precision resonant mass sensors when targeting the roof tile-shaped mode. Since the accuracy in mass determination relies on the precise knowledge of the added mass position, the maximum error due to limited spatial accuracy is determined and the mid-section of the free end is identified to be the most suitable position on the cantilever surface for mass detection.

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Section: Introductionmentioning

confidence: 99%

Position-dependent mass responsivity of silicon MEMS cantilevers excited in the fundamental, two-dimensional roof tile-shaped mode

Patocka

Schneider

Dörr

et al. 2019

J. Micromech. Microeng.

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“…In contrast, the most studied out-of-plane modes, such as the flexural or torsional ones, are considered to yield lower quality factors and may be less suitable for such application scenarios [5,6]. However, within the out-of-plane modes, the roof tile-shaped modes have proven to be a suitable candidate for liquid media or biosensing applications [7][8][9][10], due to a high quality factor and reasonably low resonant frequency.…”

Section: Introductionmentioning

confidence: 99%

Modelling and characterization of the roof tile-shaped modes of AlN-based cantilever resonators in liquid media

Ruiz-Díez

Hernando-García

Toledo

et al. 2016

J. Micromech. Microeng.

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In this work, roof tile-shaped modes of MEMS (micro electro-mechanical systems) cantilever resonators with various geometries and mode orders are analysed. These modes can be efficiently excited by a thin piezoelectric film and a properly designed top electrode. The electrical and optical characterization of the resonators are performed in liquid media and the device performance is evaluated in terms of quality factor, resonant frequency and motional conductance. A quality factor as high as 165 was measured in isopropanol for a cantilever oscillating in the seventh order roof tile-shaped mode at 2 MHz. To support the results of the experimental characterization, a 2D finite element method simulation model is presented and studied. An analytical model for the estimation of the motional conductance was also developed and validated with the experimental measurements.

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“…Microantilevers are used in a wide variety of applications such as sensors, detectors or energy producers (Wu et al, 2001) (Pei, Tian, & Thundat, 2004) (Choi, Jeon, Jeong, Sood, & Kim, 2006) (Oliver et al, 2012). Among the different device configurations for cantilever-based sensors, the use of a piezoelectric layer, embedded between two metal electrodes, is a very attractive alternative.…”

Section: Introductionmentioning

confidence: 99%

Electro-optical characterization of IC compatible microcantilevers

et al. 2015

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The aim of this work is to simulate and optically characterize the piezoelectric performance of CMOS (complementary metal oxide semiconductor) compatible microcantilevers based on aluminium nitride (A1N) and manufactured at room temperature. This study should facilitate the integration of piezoelectric micro-electromechanical systems (MEMS) devices such as microcantilevers, in CMOS technology.Besides compatibility with standard integrated circuit (IC) manufacturing procedures, low temperature processing also translates into higher throughput and, as a consequence, lower manufacturing costs. Thus, the use of the piezoelectric properties of A1N manufactured by reactive sputtering at room temperature is an important step towards the integration of this type of devices within future CMOS technology standards. To assess the reliability of our fabrication process, we have manufactured arrays of free-standing microcantilever beams of variable dimension and studied their To complete the study, X-Ray diffraction as well as d 33 piezoelectric coefficient measurements were also carried out.

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Resonantly excited AlN-based microcantilevers for immunosensing

Cited by 6 publications

References 25 publications

Position-dependent mass responsivity of silicon MEMS cantilevers excited in the fundamental, two-dimensional roof tile-shaped mode

Position-dependent mass responsivity of silicon MEMS cantilevers excited in the fundamental, two-dimensional roof tile-shaped mode

Modelling and characterization of the roof tile-shaped modes of AlN-based cantilever resonators in liquid media

Electro-optical characterization of IC compatible microcantilevers

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