Room-temperature photoreflectance in van Hoof structures together with atomic force microscopy has been used to determine the influence of InAs quantum dots on the Fermi-level pinning of ͕100͖ GaAs surfaces. We show that quantum dots with base lengths of 10 and 25 nm lead to the Fermi level being pinned approximately 250 meV deeper in the band gap, an effect which is reversible by either overgrowing the dots with GaAs or by selectively etching away the dots. These results are discussed within the framework of recent theoretical investigations of surface states due to polar facets associated with quantum dots. ͓S0163-1829͑99͒51944-9͔There has been a great interest in the preparation, characterization, and potential application of self-assembled quantum dots ͑QD's͒ over the past few years. Most often, the quantum dots which are electrically or optically characterized have been overgrown with the matrix semiconductor and are not directly on the surface. Less well understood is the effect of quantum dots on the electronic properties of the surface. The surface is altered in several important ways: part of the surface is composed of the dot material rather than the matrix, new crystallographic orientations are present due to the dots, a thin wetting layer may be present, and a strain field is added. The resulting change in the surface states will be reflected in a modification of the Fermi-level pinning at the surface.The present work describes an investigation of the effect of InAs quantum dots on the Fermi-level pinning at a (001) GaAs surface. Photoreflectance measurements have been combined with atomic force microscopy ͑AFM͒ to characterize the surface with InAs QD's directly on the surface, partially and fully overgrown with GaAs, and surfaces with the dots chemically removed. Our data show that the presence of the QD's causes the surface Fermi level to be pinned deeper into the band gap than in the case of bare GaAs. This behavior is in marked contrast to what one observes for a twodimensional InAs coverage which can be used for improving ohmic contacts by pinning the band gap less deeply. 1 We discuss this quantum-dot-induced Fermi-level pinning behavior within the framework of a recent theoretical investigation of surface states on the facets of uncovered dots. 2 The normal GaAs pinning behavior is recovered by capping the dots with sufficient GaAs so that they are no longer detectable on the surface using AFM or by selectively etching the dots chemically.The structures were grown in a Riber gas-source molecular beam epitaxy system with hydrides as group V source on (001)-oriented Si-doped GaAs substrates. After the growth of a degenerately n-doped buffer, a 500-Å undoped layer was grown, followed by the deposition of 2 monolayers ͑ML͒ of InAs. The InAs was deposited at two different substrate temperatures, T G ϭ420°C ͑with growth interruptions during the InAs deposition͒ and 500°C. The self-assembly of the QD's through the Stranski-Krastanov mechanism takes place during the deposition, which is confirmed by ...