The experimental results of single-event burnout (SEB) of super-junction power MOSFETs are reported for the first time in comparison with those of standard MOSFETs. Similar tendencies were observed from both results. While a super-junction MOSFET (SJ-MOSFET) has an attractive electrical performance such as low on-resistance and high breakdown voltage, the experiment demonstrated that there was no structural advantage in SEB tolerance.Index Terms-Angular irradiation, energetic particle induced charge spectroscopy (EPICS) spectra, power MOSFET, single-event burnout (SEB), super-junction power MOSFET.