Analysis of passive surface acoustic wave sensors using coupling of modes theory

Genji, Takuma; Kondoh, Jun

doi:10.7567/jjap.53.07kd02

Cited by 10 publications

(11 citation statements)

References 36 publications

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“…The impedance-loaded sensors are mainly analysed using delta function model, the equivalent circuit model and coupling-of-mode (COM) model [4][5][6][7]. However, the delta function model ignores the influence of electrode pairs on the performance of sensors and the equivalent circuit model is complicated to be deduced.…”

Section: Introductionmentioning

confidence: 99%

Analysis and test of a wireless impedance‐loaded SAW sensor

Xing¹,

Xie²,

Wang³

2019

Micro & Nano Letters

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Instead of a conventional wireless transceiver system that requires batteries and complex circuits, the surface acoustic wave (SAW) sensor enables wireless passive measurement. A sensor consisting of an SAW device and external impedance sensing element is analysed. Since the reflection coefficient of the reflective grating on the SAW device depends on the load impedance, the echo characteristics are influenced by the change in the impedance of external sensing element. A resistance sensor or a capacitive sensor is selected as the external sensing element. The two different types of sensors are simulated using coupling-of-mode (COM) modelling, and the relationships between amplitude and phase with load impedance are analysed. On the basis of COM theory, a wireless impedance-loaded SAW sensor is fabricated by the lift-off process and tested by a network analyser to verify the simulation results. It is observed that the test results agree well with the simulation results. The phase change is more sensitive than the amplitude based on the results obtained. The sensitivity is 0.274°/Ω for the sensor with resistance and the sensitivity of the sensor with capacitance is 1.096°/pF. These results can guide the design of the high sensitivity impedance-loaded SAW sensors in the future.

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Section: Introductionmentioning

confidence: 99%

Analysis and test of a wireless impedance‐loaded SAW sensor

Xing¹,

Xie²,

Wang³

2019

Micro & Nano Letters

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“…Surface acoustic wave (SAW) devices have been widely used in a variety of fields. There are many studies about their development in wireless communications, [1][2][3] gas sensing, [4][5][6] liquid sensing, [7][8][9][10] wireless sensing, [11][12][13] temperature sensing, [14][15][16] and biosensing [17][18][19][20][21][22] applications.…”

Section: Introductionmentioning

confidence: 99%

Effect of viscoelastic film for shear horizontal surface acoustic wave on quartz

Goto

Yatsuda

Kondoh

2015

Jpn. J. Appl. Phys.

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A numerical analysis for the mass loading sensitivity of shear horizontal surface acoustic wave (SH-SAW) immunoassay biosensors on quartz has already been studied. However, the mass loading analysis is insufficient to explain the actual biosensor performance. To understand the SH-SAW biosensor performance, we analyze the effect of a viscoelastic film on SH-SAW biosensors. In this paper, a numerical analysis using a simple viscoelastic model for the SH-SAW biosensors is presented. In the theoretical model, the bioreaction layer on the SH-SAW biosensors can be treated as a viscoelastic film. The velocity changes of the 250 MHz SH-SAWs on quartz substrates, which are covered with bovine serum albumin (BSA) layers of different thicknesses, were measured and compared with the theoretical results obtained using the proposed viscoelastic model. Good agreement of the velocity changes of SH-SAWs versus changes in the viscoelastic film thickness between theoretical and experimental results was obtained.

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“…Acoustic wave devices are relatively small and inexpensive, and many studies of their development not only as signal processing devices, [1][2][3][4][5][6] but also as sensors, [7][8][9][10][11][12] have been reported. Sensitive gas sensors have been developed using a surface acoustic wave (SAW) device that measures a velocity change of SAW due to the reaction of a sensitive film along the propagation route with gas molecules.…”

Section: Introductionmentioning

confidence: 99%

Temperature compensation of ball surface acoustic wave sensor by two-frequency measurement using undersampling

Tsuji

Oizumi

Takeda

et al. 2015

Jpn. J. Appl. Phys.

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To realize a practical two-frequency measurement (TFM) system for precise temperature compensation in a ball surface acoustic wave (SAW) sensor, the application of undersampling (US) was investigated. The subtraction coefficient for the temperature compensation in US was theoretically explained. The principle of the TFM system using US was simulated by the decimation of the oversampling (OS) waveform after applying a narrow band-pass filter, and the delay time was measured using a wavelet transform. In the application of the method to trace moisture measurement, the delay time response due to US matched that due to OS with a correlation coefficient higher than 0.9999. Although rms noise was increased by US, the response to the concentration change of 4-17 nmol/mol was measured with a signal-to-noise ratio higher than 20. From these results, it was shown that the precise output of the ball SAW sensor could be obtained even when using US, which was equivalent to that using OS.

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Analysis of passive surface acoustic wave sensors using coupling of modes theory

Cited by 10 publications

References 36 publications

Analysis and test of a wireless impedance‐loaded SAW sensor

Analysis and test of a wireless impedance‐loaded SAW sensor

Effect of viscoelastic film for shear horizontal surface acoustic wave on quartz

Temperature compensation of ball surface acoustic wave sensor by two-frequency measurement using undersampling

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