2006 IEEE International Reliability Physics Symposium Proceedings 2006
DOI: 10.1109/relphy.2006.251260
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Analysis of NBTI Degradation- and Recovery-Behavior Based on Ultra Fast VT-Measurements

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Cited by 225 publications
(155 citation statements)
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“…Historically, both the trapping of holes in oxide defects and the creation of interface states have been suspected to be the cause of the degradation [1]. A logarithmic time dependence in the degradation of the threshold voltage is often considered the characteristic signature of a hole trapping contribution [2][3][4]. Conventionally, this hole trapping has been analyzed using elastic tunneling theory which predicts it to be temperatureindependent [2][3][4].…”
Section: Introductionmentioning
confidence: 99%
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“…Historically, both the trapping of holes in oxide defects and the creation of interface states have been suspected to be the cause of the degradation [1]. A logarithmic time dependence in the degradation of the threshold voltage is often considered the characteristic signature of a hole trapping contribution [2][3][4]. Conventionally, this hole trapping has been analyzed using elastic tunneling theory which predicts it to be temperatureindependent [2][3][4].…”
Section: Introductionmentioning
confidence: 99%
“…A logarithmic time dependence in the degradation of the threshold voltage is often considered the characteristic signature of a hole trapping contribution [2][3][4]. Conventionally, this hole trapping has been analyzed using elastic tunneling theory which predicts it to be temperatureindependent [2][3][4]. However, recent results clearly indicate that the hole trapping component contributing to NBTI is thermally activated, which is incompatible with elastic tunneling [5].…”
Section: Introductionmentioning
confidence: 99%
“…1͑a͒, we recognize that for these devices, any contributions to ⌬V T from hole trapping is negligible. Further, since activation energies for hole trapping, 9 H and H 2 diffusion, and N IT generation 2,3,6,13 ͑represented by E A͑HT͒ , E A͑H͒ , E A͑H 2 ͒ , E A͑IT͒ , respectively͒ are such that E A͑HT͒ Ӷ E A͑H͒ Ͻ E A͑H 2 ͒ ϳ E A͑IT͒ / n, models involving hole trapping 9 would be inconsistent with temperature-dependent data for these specific experiments.…”
mentioning
confidence: 93%
“…Such t 0 error is not present either in classical I D -V G measurement ͑which is erroneous due to recovery issue, discussed earlier͒ or in the UFM, because in these cases ⌬V T ͑0͒ is obtained before the device is stressed. To observe the effect of time-zero delay in the OTFM results, we have used the experimental data from Reisinger et al 9 ͑at V G,stress = −2.2 V, 125°C͒, with a specified measurement delay of ϳ1 s ͑hence very small recovery͒ and t 0 ϳ 0 ͑similar to classical I D -V G ͒, as reference. Once correction due to t 0 is accounted for, we can explain n FIG.…”
mentioning
confidence: 99%
“…Para segunda interface em depleção (9) onde Cox1 é a capacitância do óxido na primeira interface, VG1 é a tensão de porta da primeira interface e VTH1 é a tensão de limiar da primeira interface.…”
Section: Figura 11 -Curva Característica Idsxvgsunclassified