Analysis of film thickness dependence on electrical equivalent model for AT-cut resonators

Nakazawa, Masaru

doi:10.1109/ultsym.1998.762294

Cited by 7 publications

(2 citation statements)

References 5 publications

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“…Mass deposited uniformly on the surface of a piezoelectric plate resonator lowers its frequency [34]- [46]; the quartz microbalance is based on this principle. This assumes that the mass is in welded contact with the resonator surface, and is represented solely by its inertial character.…”

Section: Mechanical Surface Loadingsmentioning

confidence: 99%

“…Piezoelectric resonators are used extensively as sensors for a wide variety of measurands [I]- [33], including mass loading [34]- [46], gases [47]- [48], liquids [49]- [69], mass and fluid loadings [70]- [7 11, viscoelastic/polymer coatings [72]- [79], suspensions/colloids [SO]-[S4], functionally gradient (non-homogeneous) materials and layerdstacks [85]- [SS], and textured surfaces [89]- [91]. The ensuing changes are registered as changes in fiequency, phase, and/or impedance level.…”

Section: Introductionmentioning

confidence: 99%

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Piezoelectric resonators loaded with viscoelastic and nonuniform media

Ballato¹

Proceedings of the 2002 IEEE International Frequency Control Symposium and PDA Exhibition (Cat. No.02CH37234)

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This paper uses a simple, plane bulk acoustic wave model to discuss effects arising from changes occurring at the vibrating surfaces of a piezoelectric resonator, when exposed to coatings having various properties, as well as a variety of interfacial contact behaviors. The effect of air loading on the Q values of the three thickness modes of an SC-cut quartz resonator is computed for various pressures as an example of mode coupling by mechanical boundary conditions.

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Section: Mechanical Surface Loadingsmentioning

confidence: 99%