Piezoelectric resonators loaded with viscoelastic and nonuniform media

Ballato, A.

doi:10.1109/freq.2002.1075877

Cited by 6 publications

(9 citation statements)

References 127 publications

(17 reference statements)

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“…This method remains very popular, e.g., [11][12][13][14][15][16][17][18]. References [7,14] contain many more pertinent citations. Stockbridge used the modality to measure gases [19][20].…”

Section: Introductionmentioning

confidence: 99%

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MEMS viscosity sensor

Ballato

2009

2009 IEEE International Frequency Control Symposium Joint With the 22nd European Frequency and Time Forum

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Quartz shear resonators are employed widely as sensors to measure Newtonian viscosities of liquids. Perturbation of the electrical equivalent circuit parameters of the plate resonator by the fluid loading permits calculation of the mass density -shear viscosity product. Use of doubly rotated resonators does permit additional information to be obtained, but in no case can the viscosity and mass density values be separated. In these measurements, the resonator surface is exposed to a measurand bath whose extent greatly exceeds the penetration depth of the evanescent shear mode excited by the active element. Here we discuss the more complicated situation where the separation between the resonator and a confining wall is less than the penetration depth of the fluid occupying the intervening region. The resonator perturbation in this case is a sensitive function of the separation. This important fact permits extreme miniaturization, since for temperatures and pressures ordinarily encountered with gases and liquids, and for frequencies between 10 MHz and 1 GHz, the penetration depth varies from micrometers to nanometers. Microelectro-mechanical (MEMS) versions of viscometers and associated types of fluid sensors are thereby enabled.

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“…This method remains very popular, e.g., [11][12][13][14][15][16][17][18]. References [7,14] contain many more pertinent citations. Stockbridge used the modality to measure gases [19][20].…”

Section: Introductionmentioning

confidence: 99%

“…Mason first adapted the technique for measuring liquids [8][9][10]. This method remains very popular, e.g., [11][12][13][14][15][16][17][18]. References [7,14] contain many more pertinent citations.…”

Section: Introductionmentioning

confidence: 99%

MEMS viscosity sensor

Ballato

2009

2009 IEEE International Frequency Control Symposium Joint With the 22nd European Frequency and Time Forum

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“…where Z n and Z t are the normal and tangential acoustic impedances on the surfaces of the plate [42]- [44]. We consider the case of what may be called "isotropic" acoustic impedance, i.e., the impedances in the tangential and normal directions are not coupled.…”

Section: Unelectroded Platesmentioning

confidence: 99%

“…This allows for the existence of the u 1 dominated TSh modes for AT-cut quartz. In more general situations the impedances can be represented by a 3 × 3 matrix [42], [43] which may possess couplings among displacement components in different directions. The impedances are frequency dependent in general.…”

Section: Unelectroded Platesmentioning

confidence: 99%

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Scalar Differential Equation for Slowly-Varying Thickness-Shear Modes in AT-Cut Quartz Resonators With Surface Impedance for Acoustic Wave Sensor Application

Yang

Kosinski

2013

IEEE Sensors J.

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Abstract-For time-harmonic motions, we generalize a 2-D scalar differential equation derived previously by Tiersten for slowly-varying thickness-shear vibrations of AT-cut quartz resonators. The purpose of the generalization is to include the effects of surface acoustic impedance from, e.g., mass layers or fluids for sensor applications. In addition to the variation of fields along the plate thickness, which is considered in the usual 1-D acoustic wave sensor models, the equation obtained also describes in-plane variations of the fields, and therefore can be used to study the vibrations of finite plate sensors with edge effects. The equation is compared with the theory of piezoelectricity in the special cases of acoustic waves and pure thickness vibrations in unbounded plates. An example of a finite rectangular plate is also given.

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Compound Resonators and Microweighing Sensors

Ballato

2006

2006 IEEE International Frequency Control Symposium and Exposition

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Piezoelectric resonators loaded with viscoelastic and nonuniform media

Cited by 6 publications

References 127 publications

MEMS viscosity sensor

MEMS viscosity sensor

Scalar Differential Equation for Slowly-Varying Thickness-Shear Modes in AT-Cut Quartz Resonators With Surface Impedance for Acoustic Wave Sensor Application

Compound Resonators and Microweighing Sensors

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