Analysis and Design of Closed-loop Detection Technique for Micro-grating Accelerometer

Li, Hui; Li, Shuokai; Deng, Keke; Gao, Shan; Feng, Lishuang

doi:10.1109/jlt.2018.2878097

Cited by 16 publications

(9 citation statements)

References 16 publications

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“…And we obtain the sensitivity of 6.53 × 10 3 /g and the nonlinearity within 0.28%. Compared to the previous measurement nonlinearity results of 0.35% with the same optical components [14], our proposed closed-loop parameter design method with timing sequence control obtains better nonlinearity when optimizing the dynamic performance of micrograting accelerometer.…”

Section: Experiments and Resultsmentioning

confidence: 82%

“…In addition, a dual modulation method was proposed combining intensity modulation of the laser and phase modulation on electrodes, which reveals a decrease background noise in the micro-grating accelerometer system [13]. In order to eliminate the light power fluctuation and various noises, a PDH modulation technology was adopted to improve the linearity and detection accuracy of micro-grating accelerometer [14]. Although above schemes make contributions to the linearity and detection accuracy, the dynamic performance is also essential for the wide application of micro-grating accelerometer.…”

Section: Introductionmentioning

confidence: 99%

“…The closed-loop error of micro-grating accelerometer is a weak signal containing numerous noises [20], which adds difficulty in designing the signal processing method to extract it precisely. Thus, researchers apply the modulation and demodulation method based on correlation detection principle to improve the SNR of closed-loop error and further optimize the detection accuracy of accelerometer [9], [13], [14], [19]. Unavoidably, the modulation and demodulation method brings time-delay in signal processing, and the minimum value of modulation and demodulation period is limited by response capability of optical sensing element.…”

Section: Introductionmentioning

confidence: 99%

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Design of Closed-Loop Parameters With High Dynamic Performance for Micro-Grating Accelerometer

Deng

Gao

et al. 2019

IEEE Access

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A novel closed-loop parameter design scheme with timing sequence control method is proposed to obtain fast tracking ability of micro-grating accelerometer. Firstly, we investigate a timing sequence control method to achieve the minimum time-delay of signal processing only dependent on the response capability of sensing element, which is the same as half modulation period in the designed closed-loop accelerometer system. Considering optical sensing principle and time-delay of signal processing, we establish a dynamic equation for closed-loop micro-grating accelerometer. Then, we analyze the design principle of closed-loop parameters on the condition of system stability, which describes the relationship between time-delay and control parameters to guarantee fast tracking performance of micro-grating accelerometer system. And, through proposed parameter design principle, the closed-loop parameters of micro-grating accelerometer can be obtained with the gains of forward channel and feedback channel in closed-loop detection system. The conducted experiment results show that micro-grating accelerometer can achieve the nonlinearity within 0.28%, the fast step response time of 0.8ms and −3dB bandwidth up to 525Hz, which validate the effectiveness of our parameter design scheme and timing sequence control method.INDEX TERMS Dynamic performance, micro-grating accelerometer, signal processing, time-delay.

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Section: Experiments and Resultsmentioning

confidence: 82%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Design of Closed-Loop Parameters With High Dynamic Performance for Micro-Grating Accelerometer

Deng

Gao

et al. 2019

IEEE Access

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“…At the same time, the grating interferometric cavity based accelerometer also derived a lot of improved demonstrations. The measuring principle improving schemes include advanced higher interference diffraction order scheme 33−35 , phase modulation and demodulation scheme 36−39 , closed-loop feedback scheme 40−42 , compensation scheme 39,43 , etc. whereas the sensing structure improving schemes include different structural designs 44,45 and different material designs 46 , which are all presented in Fig.…”

Section: Grating Interferometric Cavity Schemementioning

confidence: 99%

Review of micromachined optical accelerometers: from m<i>g</i> to sub-μ<i>g</i>

Wang

et al. 2021

OEA

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Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of accelerometer which combines the merits of optical measurement and Micro-Electro-Mechanical Systems (MEMS) to enable high precision, small volume and anti-electromagnetic disturbance measurement of acceleration. In recent years, with the in-depth research and development of MOEMS accelerometers, the community is flourishing with the possible applications in seismic monitoring, inertial navigation, aerospace and other industrial and military fields. There have been a variety of schemes of MOEMS accelerometers, whereas the performances differ greatly due to different measurement principles and corresponding application requirements. This paper aims to address the pressing issue of the current lack of systematic review of MOEMS accelerometers. According to the optical measurement principle, we divide the MOEMS accelerometers into three categories: the geometric optics based, the wave optics based, and the new optomechanical accelerometers. Regarding the most widely studied category, the wave optics based accelerometers are further divided into four sub-categories, which is based on grating interferometric cavity, Fiber Bragg Grating (FBG), Fabry-Perot cavity, and photonic crystal, respectively. Following a brief introduction to the measurement principles, the typical performances, advantages and disadvantages as well as the potential application scenarios of all kinds of MOEMS accelerometers are discussed on the basis of typical demonstrations. This paper also presents the status and development tendency of MOEMS accelerometers to meet the ever-increasing demand for high-precision acceleration measurement.

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“…In the open-loop system of a MEMS capacitance accelerometer, its offset is seriously influenced by electrical components, such as the front-end capacitor and the gain of an amplifier [ 20 ]. However, the closed-loop system eliminates these effects [ 22 , 23 ]. Meanwhile, the technology of modulation and demodulation in the front-end circuit eliminates the DC offset of the front-end amplifier [ 10 ].…”

Section: Decomposition Of Offsetmentioning

confidence: 99%

Research on Decomposition of Offset in MEMS Capacitive Accelerometer

et al. 2021

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In a MEMS capacitive accelerometer, there is an offset due to mechanical and electrical factors, and the offset would deteriorate the performance of the accelerometer. Reducing the offset from mechanism would benefit the improvement in performance. Yet, the compositions of the offset are complex and mix together, so it is difficult to decompose the offset to provide guidance for the reduction. In this work, a decomposition method of offset in a MEMS capacitive accelerometer was proposed. The compositions of the offset were first analyzed quantitatively, and methods of measuring key parameters were developed. Based on our proposed decomposition method, the experiment of offset decomposition with a closed-loop MEMS capacitive accelerometer was carried out. The results showed that the offset successfully decomposed, and the major source was from the fabricated gap mismatch in the MEMS sensor. This work provides a new way for analyzing the offset in a MEMS capacitive accelerometer, and it is helpful for purposefully taking steps to reduce the offset and improve accelerometer performance.

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Analysis and Design of Closed-loop Detection Technique for Micro-grating Accelerometer

Cited by 16 publications

References 16 publications

Design of Closed-Loop Parameters With High Dynamic Performance for Micro-Grating Accelerometer

Design of Closed-Loop Parameters With High Dynamic Performance for Micro-Grating Accelerometer

Review of micromachined optical accelerometers: from m<i>g</i> to sub-μ<i>g</i>

Research on Decomposition of Offset in MEMS Capacitive Accelerometer

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