“…At present, MEMS accelerometers are widely used in the fields of smartphones, automotive electronics and seismic and structural health detection [ 1 , 2 , 3 , 4 , 5 ]. Different types of acceleration detection have been used, such as optical [ 6 ], capacitance [ 7 ], piezoresistive [ 8 ], piezoelectric [ 9 ] and so on [ 10 , 11 ]. Compared to other sensing technologies, capacitive sensing is highly attractive in the literature due to its ease of compatibility with integrated circuit [ 12 ].…”