A Low Cross-Axis Sensitivity Micro-Grating Accelerometer With Double-Layer Cantilever Beams

Gao, Shan; Zhou, Zhen; Bi, Xiaowei; Feng, Lishuang

doi:10.1109/jsen.2021.3077303

Cited by 8 publications

(1 citation statement)

References 31 publications

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“…increase the range from 0.012 g to ±20 g. [121] Later, Gao et al designed the driving coil on the mass to form a force feedback with the micro-magnet on the glass substrate (Figure 31d). [122] Williams et al used large-scale motor coils instead of microcoils to form an electromagnetic force feedback accelerometer, as shown in Figure 31e, which reduced the difficulty of the process and ensured the uniformity of the magnetic force distribution. A dynamic range of 178 dB is achieved.…”

Section: Figure 32mentioning

confidence: 99%

Optical Interferometric MEMS Accelerometers

Zhao,

Qi,

Wang

et al. 2023

Laser & Photonics Reviews

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Laser interferometry is one of the most accurate measurement technologies whose displacement resolution can reach the femtometer (fm) level. With the development of Micro‐Electro‐Mechanical Systems(MEMS) technology, many excellent optical interferometric MEMS sensors have emerged, which play an essential role in intelligent manufacturing, aerospace, and many other fields. Among them, optical interferometric MEMS accelerometers develop rapidly due to their high sensitivity, low noise, and anti‐electromagnetic interference advantages. Lots of research in optical interferometric chip design, micro‐nano fabrication process, signal demodulation algorithm, and range extension technology are performed, and different types of MEMS accelerometers based on the optical interferometric principles are developed, which have been demonstrated and applied in the fields of disaster monitoring, equipment operation and maintenance, and resource exploration. This paper reviews the development status of optical interferometric MEMS accelerometers, mainly focusing on the critical problems and solutions that need to be solved in the development process of optical interferometric accelerometers, and finally introduces the typical application scenarios.

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Section: Figure 32mentioning

confidence: 99%