2006
DOI: 10.1088/0031-8949/73/6/014
|View full text |Cite
|
Sign up to set email alerts
|

Analyses of the Sn IX–Sn XII spectra in the EUV region

Abstract: The Sn IX-Sn XII spectra excited in a vacuum spark have been analysed in the 130-160 Å wavelength region. The analysis was based on the energy parameter extrapolation in the isonuclear Sn VI-VIII and Sn XIII-XIV sequence. 266 spectral lines belonging to the 4d m -(4d m−1 4f + 4p 5 4d m+1 ) (m = 6-3) transition arrays were classified in the Sn IX-Sn XII spectra for the first time. All 18 level energies of the 4d 3 configuration and 39 level energies of the strongly interacting 4d 2 4f and 4p 5 4d 4 configuratio… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
2
1

Citation Types

5
91
1
1

Year Published

2011
2011
2024
2024

Publication Types

Select...
6
1
1

Relationship

0
8

Authors

Journals

citations
Cited by 87 publications
(98 citation statements)
references
References 17 publications
(27 reference statements)
5
91
1
1
Order By: Relevance
“…The spectra reported in this article are relevant to the verification of the identifications of the EUV spectra of Sn ions [9,10] which are used as a "fuel" in the radiation sources for the projection lithography at the 135 Å wavelength. The previous analyses in [9,10] were performed without any isoelectronic or isoionic support.…”
Section: Discussionmentioning
confidence: 99%
See 2 more Smart Citations
“…The spectra reported in this article are relevant to the verification of the identifications of the EUV spectra of Sn ions [9,10] which are used as a "fuel" in the radiation sources for the projection lithography at the 135 Å wavelength. The previous analyses in [9,10] were performed without any isoelectronic or isoionic support.…”
Section: Discussionmentioning
confidence: 99%
“…The previous analyses in [9,10] were performed without any isoelectronic or isoionic support. The isoelectronic sequence Rh VIII-Cd XI was recently studied in [7].…”
Section: Discussionmentioning
confidence: 99%
See 1 more Smart Citation
“…The analyses of the UTA structure for tin and xenon are not discussed here because they have already been done in detail [6,18,19,20]. In this study, assignments of the strong discrete lines from tin and xenon ions, and the complicated broad features of tungsten ions have been performed with the help of comparisons with the previous experimental results, the experimental spectra in charge exchange collisions [21] and the theoretical calculations by Cowan code.…”
Section: Analysesmentioning
confidence: 99%
“…Transitions of the type 4p 6 4d N+1 −4p 5 4d N+2 +4p 6 4d N 4f 1 in Sn 8+ -Sn 13+ merge to form an unresolved transition array (UTA) [3] which contains thousands of individual lines and emits strongly in such a plasma at an electron temperature of~30 eV in a narrow wavelength range around 13.5 nm [4,5]. This value coincides with the wavelength of peak reflectance of~70% of the Mo/Si multilayer mirrors (MLMs) that are used in the scanning tools [6] and tin plasmas are the brightest sources at this wavelength.…”
Section: Introductionmentioning
confidence: 99%