An uncooled optically readable infrared imaging detector

Microelectromechanical systems bimaterial terahertz sensor with integrated metamaterial absorber

“…However, microbolometer cameras are not optimized to operate in the THz range due their small pixel size (∼25 μm) relative to THz wavelengths (∼100 μm) and the pixel membrane is not designed for high THz absorption. Similar limitations also apply to micromechanical bimaterial-based IR imaging technology [3,4], which is another possible candidate for THz imaging.…”

Design and analysis of the film assembly of thermo-optic infrared focal plane arrays

“…In recent years, infrared focal plane arrays (FPA) with optical readout, employing various structures (e.g., reflector and grating) supported by cantilever, have been extensively studied by many researchers (Perazzo et al 1999;Ishizuya et al 2001;Zhao et al 2002;Torun and Urey 2006;Huang et al 2006;Dong et al 2007). In such types of the FPA based on bimaterial effect, infrared detection is realized by the deflection, deformation or displacement of the sensing structures which modulate the optical phase difference and the resultant intensity of readout light.…”

Performance analysis of microcantilever arrays for optical readout uncooled infrared imaging

“…converts the angle changes of the microcantilever array to the grey level changes of its image on CCD by a knife-edge filtering operation on the spectral plane of the optical readout. Thermal images of 120 • C object [15] were obtained with this system.…”