Biosensor is the equipment for biomolecules detection and it has been widely applied in a diverse of different fields such as disease diagnosis and harmful substance detection. Introducing different types of functional materials into biosensor can give it unique characteristics such as high sensitivity and high selectivity. Silicon, carbon nanotubes, gold, graphene and platinum are all trending materials for designing biosensors. Silicon is a non-toxic material that is commonly used as an element for biosensors. Different types of silicon-based functional materials have also been developed, where these silicon-based biosensors can provide more sensitive, specific and easy sensing. This research describes the detection performance of several silicon-based biosensors and discuss their advantages and disadvantages from the experimental results. In addition, this research will give a description of their applications and future development prospects. As the study of silicon-based biosensor get more deeper, it has great potential used in clinical or medical analysis.