2019
DOI: 10.1007/s00542-019-04306-5
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An ultrasensitive acoustic wave resonator device enabled by gluing a replaceable micropillar film

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Cited by 2 publications
(2 citation statements)
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“…The T-NIL technique stamps a solid mold with micro features into a resist material at elevated pressures and temperatures. Applying heat during the imprinting creates the polymeric microstructures with exceptional mechanical properties and high repeatability . In addition, chemical vapor deposition (CVD) technique was used to deposit an uniform trichloro (1H, 1H, 2H, 2H–perfluorooctyl) silane (PFOTS) layer on these surfaces to ensure its superhydrophobicity.…”
Section: Experimental Studymentioning
confidence: 99%
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“…The T-NIL technique stamps a solid mold with micro features into a resist material at elevated pressures and temperatures. Applying heat during the imprinting creates the polymeric microstructures with exceptional mechanical properties and high repeatability . In addition, chemical vapor deposition (CVD) technique was used to deposit an uniform trichloro (1H, 1H, 2H, 2H–perfluorooctyl) silane (PFOTS) layer on these surfaces to ensure its superhydrophobicity.…”
Section: Experimental Studymentioning
confidence: 99%
“…Applying heat during the imprinting creates the polymeric microstructures with exceptional mechanical properties and high repeatability. 49 In addition, chemical vapor deposition (CVD) technique was used to deposit an uniform trichloro (1H, 1H, 2H, 2H− perfluorooctyl) silane (PFOTS) layer on these surfaces to ensure its superhydrophobicity. The scanning electron microscope (SEM) image illustrates that the micropillars have a circular cross-section and are 18.8 μm in diameter and 5.4 μm in height.…”
Section: Experimental Studymentioning
confidence: 99%