Abstract:Soft magnetic yokes, cores, and poles, as well as permanent magnets are the potential magnetic components of an electromagnetic microactuator system. Depending on the requirements of the actuator, soft magnetic materials, hard magnetic materials or a combination of both have to be applied. Their design and fabrication as well as their integration into coil systems is one aspect of the Collaborate Research Center Design and Fabrication of Active Microsystems (Sonderforschungsbereich 516). The investigations pre… Show more
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