Molybdenum (Mo) thin films were deposited by direct current magnetron sputtering on stainless steel followed by argon ion bombardment. Samples were then irradiated by hydrogen ion beam with an energy of 10 keV and a dose of 1 × 10 18 ions cm −2 . In order to understand the effect of hydrogen ion irradiation on the films, SEM was used to observe the surface morphology of films. X-ray diffraction spectra (XRD) and XPS were used for characterization of the chemical bonding states of Mo and O contamination on the surface of the Mo films before and after hydrogen ion irradiation. Infrared (IR) spectra were also used to study bonds of Mo, O, and H. The mechanism related to this phenomenon is suggested in this article.