An Integrated Photoacoustic Terahertz Gas Sensor

Verstuyft, Mattias; Akiki, Elias; Walter, Benjamin; Faucher, M.; Vanwolleghem, Mathias; Kuyken, Bart

doi:10.1109/irmmw-thz.2019.8873764

Cited by 3 publications

(1 citation statement)

References 9 publications

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“…Another way to improve an efficiency of the conversion of optical radiation power absorbed by the studied gas into the electrical signal is by combing optical and acoustical resonances. Verstuyft M. and co-authors [53] proposed a detector based on a photonic crystal resonator with a cylindrical cavity (modal volume 1.5 × 10 4 µm 3 ). It is closed at one end by a thin membrane so that it forms a semi-open acoustic resonator, the fundamental frequency of which was 720 kHz.…”

Section: Qtf-based Thz Pad Designmentioning

confidence: 99%

Quartz-Enhanced Photoacoustic Spectroscopy in the Terahertz Spectral Range

Votintsev,

Borisov,

Makashev

et al. 2023

Photonics

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Infrared laser photo-acoustic spectroscopy provides very high sensitivity of a gas sample analysis when high-power tunable laser radiation sources and resonant photo-acoustic detectors (PADs) are used. In the resonant PAD, the acoustic signal generated by absorbed laser radiation in a measurement chamber is amplified proportionally to a Q-factor of the acoustic resonator. But, compact tunable high-power lasers (with power above 100 mW) still are not widely spread in the terahertz spectral range. One of the ways to achieve an acceptable sensitivity of terahertz photo-acoustic spectroscopy is using PADs with a very high Q-factor. The latter can be achieved using PAD with a quartz tuning fork. The current state in this field is presented in the review.

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Section: Qtf-based Thz Pad Designmentioning

confidence: 99%

Quartz-Enhanced Photoacoustic Spectroscopy in the Terahertz Spectral Range

Votintsev,

Borisov,

Makashev

et al. 2023

Photonics

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High Q factor and high transmittance suspended membrane THz PhC cavity: experimental demonstration for sensing applications

Akiki¹,

Verstuyft²,

Ducournau³

et al. 2020

2020 45th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz)

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High-Q THz Photonic Crystal Cavity on a Low-Loss Suspended Silicon Platform

Akiki

Verstuyft

Kuyken

et al. 2021

IEEE Trans. THz Sci. Technol.

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In this work, we present an ultra-high Q cavity at Terahertz (THz) frequencies. The designed cavity is built on a low loss suspended silicon (Si) waveguide. The substrate removal under the waveguide and the use of optimized deep reactive ion etching processing is the main reason for observing very low losses of this design α< 0.09 dB/mm. This very low loss behavior of this designed platform is also demonstrated by the measurement of a 1D photonic wire crystal cavity with Q>18000. Different cavity layouts are adjusted in order to maximize the transmittance while maintaining high Q. A design with reduced number of etched crystal holes achieve a Q>1500 and high transmittance T>70%. These structures are presented at sub-mm waves (around 600GHz) for the design of a gas sensor in this frequency region, but the principles can be scaled and redesigned for other frequencies in the THz band.

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An Integrated Photoacoustic Terahertz Gas Sensor

Cited by 3 publications

References 9 publications

Quartz-Enhanced Photoacoustic Spectroscopy in the Terahertz Spectral Range

Quartz-Enhanced Photoacoustic Spectroscopy in the Terahertz Spectral Range

High Q factor and high transmittance suspended membrane THz PhC cavity: experimental demonstration for sensing applications

High-Q THz Photonic Crystal Cavity on a Low-Loss Suspended Silicon Platform

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