2021
DOI: 10.1109/tthz.2020.3019928
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High-Q THz Photonic Crystal Cavity on a Low-Loss Suspended Silicon Platform

Abstract: In this work, we present an ultra-high Q cavity at Terahertz (THz) frequencies. The designed cavity is built on a low loss suspended silicon (Si) waveguide. The substrate removal under the waveguide and the use of optimized deep reactive ion etching processing is the main reason for observing very low losses of this design α< 0.09 dB/mm. This very low loss behavior of this designed platform is also demonstrated by the measurement of a 1D photonic wire crystal cavity with Q>18000. Different cavity layouts are a… Show more

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Cited by 20 publications
(13 citation statements)
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References 37 publications
(44 reference statements)
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“…[ 35 ] Despite the sharp corners in the loop, the kink states circulate with minimal counter‐propagation, resisting the formation of standing waves, hence giving rise to a series of regularly spaced resonances (see Section S2 in the Supporting Information). The topological cavity is fundamentally different from traditional cavity designs such as photonic crystal cavities [ 36–38 ] or nanobeam cavities, [ 39 ] which rely on careful structural optimization. The geometrical insensitivity of the topological cavity offers excellent flexibility in design and fabrication; although we have focused on a parallelogram‐shaped loop with four sharp corners, it is possible to design cavities with other shapes (see Section S2 in the Supporting Information).…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…[ 35 ] Despite the sharp corners in the loop, the kink states circulate with minimal counter‐propagation, resisting the formation of standing waves, hence giving rise to a series of regularly spaced resonances (see Section S2 in the Supporting Information). The topological cavity is fundamentally different from traditional cavity designs such as photonic crystal cavities [ 36–38 ] or nanobeam cavities, [ 39 ] which rely on careful structural optimization. The geometrical insensitivity of the topological cavity offers excellent flexibility in design and fabrication; although we have focused on a parallelogram‐shaped loop with four sharp corners, it is possible to design cavities with other shapes (see Section S2 in the Supporting Information).…”
Section: Resultsmentioning
confidence: 99%
“…The reported Q factor is the highest so far at THz frequencies. PC cavity [36,38,53] Racetrack ring [54] 2839 ≈77 0.218 No Yes ≈13λ 0 WGM sphere [55] 15 000 ≈41 0.62 No Yes ≈26λ 0 WGM bubble [56] 440 ≈1000 0.47 No No ≈31λ 0 WGM resonator [57,58] 1867 www.advmat.de www.advancedsciencenews.com critical coupling by photoexcitation to control the intensity of the resonant transmission dips.…”
Section: Tablementioning
confidence: 99%
“…This allows us to effectively control the interference in transmitted and reflected waves, thus generating the desired stopband or passband response over a particular frequency band. 6,7 Accordingly, a number of terahertz filters based on microwave [8][9][10] and optical [11][12][13] waveguiding structures have been proposed. However, microwavetechnology-based filters suffer from high metallic loss at terahertz bands.…”
Section: Introductionmentioning
confidence: 99%
“…From the optics side, thin-film filters consisting of multi-layer dielectrics 11 are also not integratable despite their structural and design simplicity. Furthermore, although one dimensional photonic crystal cavities 13 have good integrability, the passband has significant fluctuations resulting from the strong refractive index contrast between air and silicon. In addition, the 3-dB bandwidth tends to be large due to the same reason, thus limiting designability.…”
Section: Introductionmentioning
confidence: 99%
“…In [3] we proposed the design of an integrated THz PA gas sensor for monitoring food spoilage. It is based on the confinement of the THz light in a PhC cavity with high Q factors [4] to increase the light-molecules interaction. Gas molecules absorbing the THz modulated light produce sound waves that are enhanced inside an acoustical cylinder which is at the same time the etched hole of the PhC THz cavity and then detected by a Poly-Si microphone covering the bottom of the cylinder.…”
mentioning
confidence: 99%