2019
DOI: 10.1007/s00339-019-3165-9
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An insight to the performance of vertical super-thin body (VSTB) FET in presence of interface traps and corresponding noise and RF characteristics

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Cited by 17 publications
(10 citation statements)
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“…Figure 10(b) depicts the effect of gs and ox on LG variation with respect to VGS at VDS = 0.7 V. The parasitic capacitance gs and intrinsic capacitance ox decreases with LG scaling [18]. The device exhibits gs of 0.2 fF at LG = 5 nm and 0.1 fF which is 5x times increment.…”
Section: Results Analysismentioning
confidence: 99%
“…Figure 10(b) depicts the effect of gs and ox on LG variation with respect to VGS at VDS = 0.7 V. The parasitic capacitance gs and intrinsic capacitance ox decreases with LG scaling [18]. The device exhibits gs of 0.2 fF at LG = 5 nm and 0.1 fF which is 5x times increment.…”
Section: Results Analysismentioning
confidence: 99%
“…9,10 In addition, since the carrier transport is primarily controlled by a single gate, carrier mobility improves for lower body thickness in a VSTB FET. 10,11 Hence, I on also enhances. Besides, the fabrication of this new device is much simpler than SOI FETs.…”
Section: Introductionmentioning
confidence: 95%
“…These extremely thin fins, lacking mechanical strength, can be broken or washed away anytime during the cleaning process by the sonication method. [7][8][9][10][11][12] All these challenges encountered with these novel devices encourage further innovation of the device structure. From this perspective, Koldyaev and Pirogova introduced a new single gate structure called vertical super-thin body (VSTB) FET, in which a semiconducting low doped VSTB is constituted on a dielectric wall, such as the shallow-trench isolation (STI) wall.…”
Section: Introductionmentioning
confidence: 99%
“…However, the shrinkage of FinFETs primarily demands high aspect ratio (height to width) of 3‐D thin fins that stand alone onto the substrate absolutely without any support. This requirement reduces the mechanical stability of fins in modern devices; also, the manufacturing process of such fins is becoming pretty challenging day by day as those can be broken or washed away anytime during the cleaning process by sonication method 7–13 . Therefore, such challenges associated with these novel devices encourage further evolution of device structure.…”
Section: Introductionmentioning
confidence: 99%