2019
DOI: 10.1016/j.ultramic.2019.04.005
|View full text |Cite
|
Sign up to set email alerts
|

An in-situ approach for preparing atom probe tomography specimens by xenon plasma-focussed ion beam

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

1
27
0

Year Published

2020
2020
2022
2022

Publication Types

Select...
8

Relationship

1
7

Authors

Journals

citations
Cited by 31 publications
(28 citation statements)
references
References 27 publications
1
27
0
Order By: Relevance
“…In most cases, a low kV (≤ 5 kV) final annular milling step is applied to APT tips to ensure beam damage and ion implantation are minimised. In addition, the recent development of xenon plasma FIB systems, which remove the Ga contamination problem, has significant potential for atom probe sample preparation (Halpin et al ).…”
Section: Sample Selection and Preparationmentioning
confidence: 99%
“…In most cases, a low kV (≤ 5 kV) final annular milling step is applied to APT tips to ensure beam damage and ion implantation are minimised. In addition, the recent development of xenon plasma FIB systems, which remove the Ga contamination problem, has significant potential for atom probe sample preparation (Halpin et al ).…”
Section: Sample Selection and Preparationmentioning
confidence: 99%
“…APT requires the needle-shaped specimens to produce an electrostatic field sufficiently intense to provoke field evaporation of atoms on the surface. With the availability of PFIB, an in situ APT specimen preparation strategy was revisited recently (38,39), in which specimens were fabricated directly from the original flat sample prepared for scanning electron microscopy (SEM) imaging, eliminating the need for conventional liftout and Pt-welding procedures (40). The details of each step are described in Methods.…”
Section: Specimen Preparationmentioning
confidence: 99%
“…The protocol introduced by Halpin et al (38) was adapted to dig a moat and leave a pillar in the middle. The pillar is then sharpened using a Xe-plasma beam.…”
Section: Cryo-fib Equipmentmentioning
confidence: 99%
See 1 more Smart Citation
“…The ability to accurately characterize grain boundaries in Al alloys, will undoubtedly enable the elucidation of intergranular corrosion mechanisms. While additional investigations are required to identify the exact influence of FIB-milling and transfer temperatures on Ga diffusivity in Al alloys, these preliminary results show that maintaining cryogenic temperatures is a way to obtain Ga-free grain boundaries in such materials without resorting to alternative plasma-based FIB systems [36][37][38].…”
Section: Plos Onementioning
confidence: 90%