A versatile cryo-transfer system, connecting cryogenic focused ion beam sample preparation to atom probe microscopy

Abstract

Atom probe tomography (APT) is a powerful technique to obtain 3D chemical and structural information, however the ‘standard’ atom probe experimental workflow involves transfer of specimens at ambient conditions. The ability to transfer air- or thermally-sensitive samples between instruments while maintaining environmental control is critical to prevent chemical or morphological changes prior to analysis for a variety of interesting sample materials. In this article, we describe a versatile transfer system that enables cryogenic- or room-temperature transfer of specimens in vacuum or atmospheric conditions between sample preparation stations, a focused ion beam system (Zeiss Crossbeam 540) and a widely used commercial atom probe system (CAMECA LEAP 4000X HR). As an example for the use of this transfer system, we present atom probe data of gallium- (Ga)-free grain boundaries in an aluminum (Al) alloy specimen prepared with a Ga-based FIB.

The Prospect of Spatially Accurate Reconstructed Atom Probe Data Using Experimental Emitter Shapes

“…Aside from the development of an in situ system, a potential solution is using an apparatus that allows to interface between the SPM and APT systems under vacuum conditions. Multiple endeavors toward similar apparatuses are currently in place within the APT community to broaden APT research to air and temperature-sensitive materials among others (Gerstl & Wepf, 2015; Perea et al, 2017; Stephenson et al, 2018; Cairney et al, 2019; Rice et al, 2019; Macauley et al, 2021).…”

Atom probe tomography and correlative microscopy: Key techniques for future planetary science studies

“…A goal to address the aforementioned challenges is the development of atom probe instrumentation that enables the collection of significantly improved raw data, negating the need for intricate validation methods. 3 Cryo/vacuum transfer systems and a new H-free Ti analysis chamber have already been developed and have been used to address issues of H contamination [59][60][61][62] and provide scope for improved accuracy in the study of hydrous minerals. A proof of concept energy-position-sensitive detector has also recently been developed.…”

Imaging of hydrogen in metals using an atom probe with ultra-low hydrogen background

“…To this end, we developed a cryo-and vacuum transfer solution that allows for a full cold chain between various sample preparation stations and the titanium atom probe [5]. The most important connection hereby is the connection with the focused ion beam system.…”