2014
DOI: 10.1109/jssc.2013.2284347
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An Implantable 455-Active-Electrode 52-Channel CMOS Neural Probe

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Cited by 217 publications
(85 citation statements)
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“…This technique spread throughout the MEMS community and formed the basis for many other novel electromechanical structures. The planar lithography approach has evolved over the years to include integrated interconnects 38 , active electronics 35,39,40 , cochlear implants 41,42 , polytrodes 31 , and three-dimensional arrays 29,[43][44][45] . An important simplification for defining and releasing fine neural probe structures has been the use of silicon-on-insulator (SOI) wafers and deep reactive ion etching (DRIE) 46,47 that many groups have adopted.…”
Section: Recording Brain Activity Brief Historymentioning
confidence: 99%
See 1 more Smart Citation
“…This technique spread throughout the MEMS community and formed the basis for many other novel electromechanical structures. The planar lithography approach has evolved over the years to include integrated interconnects 38 , active electronics 35,39,40 , cochlear implants 41,42 , polytrodes 31 , and three-dimensional arrays 29,[43][44][45] . An important simplification for defining and releasing fine neural probe structures has been the use of silicon-on-insulator (SOI) wafers and deep reactive ion etching (DRIE) 46,47 that many groups have adopted.…”
Section: Recording Brain Activity Brief Historymentioning
confidence: 99%
“…Some of most advanced silicon designs include double-sided, high-density arrays 29,102 , three-dimensional arrangements 43 , and integrated electronics 39,40,132 . Although the inherent brittleness of silicon is a concern for some clinical applications, its electrical, mechanical, and thermal properties offer the greatest design options and are supported by a wide range of commercial microfabrication tools.…”
Section: Substrate Materials and Microfabricationmentioning
confidence: 99%
“…However, AC-coupled inverting amplifiers with capacitive feedback [27] address both issues, thus being widely used in wearable and implantable medical instruments [28] [29]. An AE built with a capacitively coupled inverting amplifier [30] is shown in Fig.…”
Section: B Inverting Amplifiersmentioning
confidence: 99%
“…A sensor site and the surrounding stimulation site can be seen in Fig. 1b Besides the comparably large, planar in-vitro systems, which are in the focus of this contribution, there are also CMOS-based needle-type probes for recording and stimulation in vivo that have been pioneered at the University of Michigan [3,[29][30][31][32][33] and adopted by other groups ( Figure 2) [34][35][36][37]. Such electrode arrays are inserted into the living brain and facilitate advances in the understanding of the nervous system.…”
Section: Cmos High-density Systemsmentioning
confidence: 99%