An experimental study on MEMS-based gas flow sensor for wide range flow measurements

Djuzhev, N. A.; Novikov, D. L.; Demin, G. D.; Ovodov, A. I.; Ryabov, Vladimir T.

doi:10.1109/sas.2018.8336727

Cited by 18 publications

(4 citation statements)

References 4 publications

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“…CMOS MEMS technology has been utilized in recent times for the fabrication of lowcost micromachined flow sensors [4,62,161,[168][169][170]. Flow sensors are the key elements in most systems for monitoring and controlling fluid flows.…”

Section: Case Study Of Flow Sensor Using Umc 018 µM Cmos Mems Processmentioning

confidence: 99%

Foundry Service of CMOS MEMS Processes and the Case Study of the Flow Sensor

et al. 2022

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The complementary metal-oxide-semiconductor (CMOS) process is the main stream to fabricate integrated circuits (ICs) in the semiconductor industry. Microelectromechanical systems (MEMS), when combined with CMOS electronics to form the CMOS MEMS process, have the merits of small features, low power consumption, on-chip circuitry, and high sensitivity to develop microsensors and micro actuators. Firstly, the authors review the educational CMOS MEMS foundry service provided by the Taiwan Semiconductor Research Institute (TSRI) allied with the United Microelectronics Corporation (UMC) and the Taiwan Semiconductor Manufacturing Company (TSMC). Taiwan’s foundry service of ICs is leading in the world. Secondly, the authors show the new flow sensor integrated with an instrumentation amplifier (IA) fabricated by the latest UMC 0.18 µm CMOS MEMS process as the case study. The new flow sensor adopted the self-heating resistive-thermal-detector (RTD) to sense the flow speed. This self-heating RTD half-bridge alone gives a normalized output sensitivity of 138 µV/V/(m/s)/mW only. After being integrated with an on-chip amplifier gain of 20 dB, the overall sensitivity of the flow sensor was measured and substantially improved to 1388 µV/V/(m/s)/mW for the flow speed range of 0–5 m/s. Finally, the advantages of the CMOS MEMS flow sensors are justified and discussed by the testing results.

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Section: Case Study Of Flow Sensor Using Umc 018 µM Cmos Mems Processmentioning

confidence: 99%

Foundry Service of CMOS MEMS Processes and the Case Study of the Flow Sensor

et al. 2022

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“…Os sensores do tipo calorimétrico, especificamente, são apropriados para uma grande variedade de propósitos. Todavia, em alguns casos, sua aplicaçãoé limitada pela velocidade máxima que o dispositivoé capaz de mensurar (Djuzhev et al, 2018). O presente trabalho tem por objetivo demonstrar o princípio de funcionamento, as etapas de desenvolvimento e os resultados da simulação computacional de um microssensor de fluxo de massa, concebido sob a perspectiva da tecnologia MEMS.…”

Section: Introductionunclassified

Projeto de microssensor de fluxo de massa para medição de velocidade de fluidos

Santos

Barbosa

Moreira

2019

Anais Do 14º Simpósio Brasileiro De Automação Inteligente

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In this paper, the main characteristics and steps for design and simulation of a thermal mass flow microsensor of calorimetric type are described, aiming to measure flow rate and fluid velocity. The device was designed computationally and its applicability evaluated based on the simulation data. The results leaded to conclude that flows speed between 0 and 14 m/s can be measured using the proposed sensor. Resumo: Neste trabalho são descritas as principais características e etapas de projeto e simulação de um microssensor de fluxo de massa do tipo calorimétrico, tendo como objetivo aferir vazão e velocidade de fluidos. O dispositivo foi projetado computacionalmente e sua aplicabilidade avaliada a partir dos resultados de simulação. Os dados obtidos permitiram concluir que a velocidades entre 0 e 14 m/s podem ser mensuradas por meio do aparato proposto.

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“…Тонкие пленки термоэлектрических материалов используются при создании термоэлементов в радиометрии [1,2], микрокалориметрии [3][4][5], для измерения концентрации газов [6,7], в том числе и на гибких подложках [8,9]. Широкодиапазонные приемники излучения (ПИ) на основе радиационных термоэлементов ( " thermopile") используются для измерения энергетических характеристик лазерного излучения [10,11], тепловых потоков [12,13], в MEMS-измерительных микросистемах [14], в космических аппаратах [15,16] и др.…”

Section: Introductionunclassified

Радиационные Термоэлементы На Основе Теллурида Висмута, Получаемые Методом Импульсного Лазерного Осаждения

Шупенев¹,

Коршунов²,

Ильин³

et al. 2019

Физика И Техника Полупроводников

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Radiation thermopiles are basic structures for sensors used for measuring energy parameters of different radiation with wavelength from 0.1 to 100 mcm. Current work describes features of using p-Bi0.5Sb1.5Te3 and n-Bi2Te2.7Se0.3 thin film thermopiles obtained with pulsed laser deposition method on different substrates. Thermal modeling and experimental research reveal the possibility of achieving responsivity of 1 V/W and time constant of 10 seconds with the use of polyimide substrates and absorption zone of 16 mm in diameter

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An experimental study on MEMS-based gas flow sensor for wide range flow measurements

Cited by 18 publications

References 4 publications

Foundry Service of CMOS MEMS Processes and the Case Study of the Flow Sensor

Foundry Service of CMOS MEMS Processes and the Case Study of the Flow Sensor

Projeto de microssensor de fluxo de massa para medição de velocidade de fluidos

Радиационные Термоэлементы На Основе Теллурида Висмута, Получаемые Методом Импульсного Лазерного Осаждения

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