An electromagnetically actuated bi-stable MEMS optical microswitch

Gatzen, H.H.; Obermeier, Ε.; Kohlmeier, T.; Budde, Thomas; Ngao, Ha Duong; Mukhopadhyay, Biswajit; Farr, M.

doi:10.1109/sensor.2003.1217065

Cited by 12 publications

(13 citation statements)

References 13 publications

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“…As a result, MEMS electrostatic actuators are much more prevalent and are extensively studied in the literature [ [3], [4] and references therein]. Nevertheless, because of the many possible applications and market requirements, MEMS magnetostatic actuators are currently drawing much attention [5]- [20].…”

Section: Introductionmentioning

confidence: 99%

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A methodology and model for the pull-in parameters of magnetostatic actuators

Nemirovsky

Zelniker

Degani

et al. 2005

J. Microelectromech. Syst.

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Magnetostatic actuators exhibit bistability similarly to the Pull-In phenomena of electrostatic actuators. In this paper a methodology and model for the extraction of the magnetic Pull-In parameters of magnetostatic actuators are derived. The flux-controlled magnetostatic actuator is analyzed based on the energy representation and the magnetomotive force-controlled magnetostatic actuator is analyzed in the thermodynamic potential energy (or co-energy) representation. An algebraic equation, referred to as the magnetic Pull-In equation, for each of the two cases (flux-controlled and magnetomotive force-controlled actuators) is derived. By solving these Pull-In equations either analytically or numerically, the magnetic Pull-In parameters are obtained. Several case studies, covering displacement and torsion magnetic actuators, are presented and analyzed, illustrating the usefulness of the proposed methodology, its relative simplicity as well as the adaptability and practical usage in wide spectrum of magnetic actuators.[1425]

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Section: Introductionmentioning

confidence: 99%

“…It was shown that magnetostatic actuators may exhibit similar inherent bistable phenomenon [19], [20]. This bistability is used, for example, to obtain an optical valve that latches in the open position and requires power only to switch between the two stable positions.…”

Section: Introductionmentioning

confidence: 99%

A methodology and model for the pull-in parameters of magnetostatic actuators

Nemirovsky

Zelniker

Degani

et al. 2005

J. Microelectromech. Syst.

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show abstract

“…CMP of the combination of NiFe together with SU-8 as an insulating material has been used for the manufacturing of electromagnetically actuated MEMS optical microswitches [32].…”

Section: More Representative Applicationsmentioning

confidence: 99%

Fabrication of Microdevices Using CMP

Zwicker

2007

Microelectronic Applications of Chemical Mechanical Planarization

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“…Magnetic thin film actuators have been used for a wide range of applications and represent a rapidly growing field with great future potential [1]. These electromagnetic microactuators have been applied in an optical switch [2], a microvalve [3], a microrelay [4], and other actuating micro devices. Microactuation based on the electromagnetic principle provides rather high forces, high frequencies, and excels in a low driving voltage.…”

Section: Introductionmentioning

confidence: 99%

An approach for simulating magnetic microactuators

Dinulovic

Gatzen

2008

EuroSimE 2008 - International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronic

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Micro electro-mechanical systems (MEMS) are fabricated by combining deposition and etching techniques in conjunction with photo lithography for patterning. Due to this complex fabrication approach it is nearly impossible to easily fabricate prototypes. As a result modeling and simulation techniques are applied in the design process for such devices. This paper pinpoints an approach for modeling and simulating an electromagnetic microactuator. Establishing analytical model allows coming up with a cursory design, while a Finite Element Method (FEM) analysis allows furthering optimum design features.

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An electromagnetically actuated bi-stable MEMS optical microswitch

Cited by 12 publications

References 13 publications

A methodology and model for the pull-in parameters of magnetostatic actuators

A methodology and model for the pull-in parameters of magnetostatic actuators

Fabrication of Microdevices Using CMP

An approach for simulating magnetic microactuators

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