A methodology and model for the pull-in parameters of magnetostatic actuators

Nemirovsky, Y.; Zelniker, I.; Degani, Ofir; Sarusi, G.

doi:10.1109/jmems.2005.859074

Cited by 15 publications

(15 citation statements)

References 18 publications

(44 reference statements)

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“…It can be seen that the nonlinear relationship between the electrostatic force and the gap between both plates leads to two potential equilibrium configurations. However, the left equilibrium configuration is unstable so that the electrostatic force can not be balanced by the spring beyond this point [201,225]. This is widely known as a pull-in instability.…”

Section: Electrostatic and Magnetostaticmentioning

confidence: 99%

Pressure-actuated cellular structures

2012

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Shape changing structures will play an important role in future engineering designs since rigid structures are usually only optimal for a small range of service conditions. Hence, a concept for reliable and energy-efficient morphing structures that possess a large strength to self-weight ratio would be widely applicable. We propose a novel concept for morphing structures that is inspired by the nastic movement of plants. The idea is to connect prismatic cells with tailored pentagonal and/or hexagonal cross sections such that the resulting cellular structure morphs into given target shapes for certain cell pressures. An efficient algorithm for computing equilibrium shapes as well as cross-sectional geometries is presented. The potential of this novel concept is demonstrated by several examples that range from a flagellum like propulsion device to a morphing aircraft wing.

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Section: Electrostatic and Magnetostaticmentioning

confidence: 99%

Pressure-actuated cellular structures

2012

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“…The capacitance of this system can be computed by integrating the capacitance of differential capacitors each of them having a capacity of [31] …”

Section: Problem Formulationmentioning

confidence: 99%

Analytical modeling of static behavior of electrostatically actuated nano/micromirrors considering van der Waals forces

Moeenfard

Ahmadian

2012

Acta Mech Sin

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In this paper, the effect of van der Waals (vdW) force on the pull-in behavior of electrostatically actuated nano/micromirrors is investigated. First, the minimum potential energy principle is utilized to find the equation governing the static behavior of nano/micromirror under electrostatic and vdW forces. Then, the stability of static equilibrium points is analyzed using the energy method. It is found that when there exist two equilibrium points, the smaller one is stable and the larger one is unstable. The effects of different design parameters on the mirror's pull-in angle and pull-in voltage are studied and it is found that vdW force can considerably reduce the stability limit of the mirror. At the end, the nonlinear equilibrium equation is solved numerically and analytically using homotopy perturbation method (HPM). It is observed that a sixth order perturbation approximation can precisely model the mirror's behavior. The results of this paper can be used for stable operation design and safe fabrication of torsional nano/micro actuators.

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“…Equation 35is written in the deformed configuration, i.e., in the projected fluid domain which varies with the deformation of the structure (x and z are the coordinates in the deformed configuration). A Lagrangian form of equation 35 (36) where X, Z are the coordinates of the fluid domain corresponding to the undeformed state of the movable structure and u is the deformation of the movable structure in the X direction. As the 2D mechanical equations are solved in the X-Y domain, mechanical deformation and its variation in the Z direction are assumed to be zero.…”

Section: Mechanical and Fluidic Analysismentioning

confidence: 99%

“…The fluid pressure, P f , obtained from equation 36is integrated along the Z direction to compute an effective fluid pressure, P f e , which is applied as a boundary condition in the 2D mechanical analysis in the X-Y domain [27]. The mean free path, λ, (used for computing K in equation (36)) is related to the ambient temperature and pressure by the relation [29]…”

Section: Mechanical and Fluidic Analysismentioning

confidence: 99%

A hybrid full-Lagrangian technique for the static and dynamic analysis of magnetostatic MEMS

De¹,

Aluru²

2006

J. Micromech. Microeng.

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Magnetostatic microelectromechanical systems (MEMS) are based on the electromagnetic interactions between magnetic microstructures and active (coils) or passive (permanent magnets) magnetic field sources. They offer distinct advantages at the micrometer scale in strength, polarity and distance of actuation, when compared to other methods of actuation in MEMS. For proper understanding and detailed exploration of magnetostatic MEMS, it is important to have a reliable and efficient physical level simulation tool. In this paper, we propose an efficient technique, namely the hybrid full-Lagrangian technique for the static and dynamic analysis of magnetostatic MEMS. In this technique, the magnetostatic analysis needed to compute the magnetostatic force acting on the microstructure is performed using a hybrid BIE/Poisson approach. The Poisson equation is solved for the interior magnetostatic domains and the boundary integral equation (BIE) formulation of the potential equation is solved for the exterior magnetostatic domain and the different domains are coupled through interface conditions. A Lagrangian description of all the physical domains (magnetostatic, mechanical and fluidic) is used to eliminate geometry updates and rediscretization. The Lagrangian formulation along with the hybrid approach makes the proposed technique much more efficient than conventional tools for the analysis of magnetostatic MEMS. The new technique is used to simulate several magnetostatic MEMS switches and relays and validated by comparing numerical simulation results with experimental data. Dynamic analysis of a magnetostatic MEMS switch is performed using the new technique.

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A methodology and model for the pull-in parameters of magnetostatic actuators

Cited by 15 publications

References 18 publications

Pressure-actuated cellular structures

Pressure-actuated cellular structures

Analytical modeling of static behavior of electrostatically actuated nano/micromirrors considering van der Waals forces

A hybrid full-Lagrangian technique for the static and dynamic analysis of magnetostatic MEMS

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