EuroSimE 2008 - International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronic 2008
DOI: 10.1109/esime.2008.4525037
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An approach for simulating magnetic microactuators

Abstract: Micro electro-mechanical systems (MEMS) are fabricated by combining deposition and etching techniques in conjunction with photo lithography for patterning. Due to this complex fabrication approach it is nearly impossible to easily fabricate prototypes. As a result modeling and simulation techniques are applied in the design process for such devices. This paper pinpoints an approach for modeling and simulating an electromagnetic microactuator. Establishing analytical model allows coming up with a cursory design… Show more

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Cited by 3 publications
(2 citation statements)
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“…By applying the electromagnetic principle, different microactuators like a bi-stable optical microswitch [5] or an integrated second stage microactuator for a hard disk recording head [6] were designed and fabricated at the Institute for Microtechnology (imt). A proven approach for the design of such microsystems is to create a Finite Element Method (FEM) model for these systems and simulate their behavior when excited [7]. Applying this approach, the electromagnetic device used in the hearing implant was designed by 2-D and 3-D electromagnetic simulations.…”
Section: Introductionmentioning
confidence: 99%
“…By applying the electromagnetic principle, different microactuators like a bi-stable optical microswitch [5] or an integrated second stage microactuator for a hard disk recording head [6] were designed and fabricated at the Institute for Microtechnology (imt). A proven approach for the design of such microsystems is to create a Finite Element Method (FEM) model for these systems and simulate their behavior when excited [7]. Applying this approach, the electromagnetic device used in the hearing implant was designed by 2-D and 3-D electromagnetic simulations.…”
Section: Introductionmentioning
confidence: 99%
“…Microactuation based on the electromagnetic principle provides rather high forces, high frequencies, and features a low driving voltage [11]. Optimizing the fraction of the cross section exposed to the external magnetic field in a magnetic microactuator is a key requirement for a highly efficient microactuator.…”
Section: Modeling Of Magnetic Microsystemsmentioning
confidence: 99%