A Slider With an Integrated Microactuator (SLIM) for Second Stage Actuation in Hard Disc Drives

Gatzen, H.H.; Freitas, P. P.; Obermeier, Ε.; Robertson, John

doi:10.1109/tmag.2008.2002592

Cited by 10 publications

(5 citation statements)

References 5 publications

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“…This ultimately requires a thinning to a height of 100 µm for the application in the SLIM device during system integration [5]. Figure 4 and Tab.…”

Section: Fabrication Stepsmentioning

confidence: 99%

“…For determining the building height of the components, in particular the SU-8 TM embedding and the Si 3 N 4 layer thickness, a cross section was generated by dicing, nanogrinding, and CMP. An actual functional test of the complete system requires a system integration of the magnetic microactuator with its micromechanics [5]. However, for conducting a preliminary functional test, a test set-up consisting of a diced magnetic microactuator and a matching micromechanics system was used.…”

Section: Microactuator Evaluationmentioning

confidence: 99%

“…The chiplet carries the read/write element. The microactuator is capable of moving the read/write element up and down (for head-to-disk spacing adjustment) as well as on an arc in lateral direction (allowing second stage actuation) [5]. Figure 1 shows a schematic representation of the SLIM design compared to a commercial slider.…”

mentioning

confidence: 99%

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Improved Fabrication of an Integrated Electromagnetic Second Stage Microactuator for a Hard Disk Recording Head

Saalfeld

Dinulovic

Gatzen

2009

Volume 12: Micro and Nano Systems, Parts a and B

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Key mechanical requirements for advanced Hard Disk Drive (HDD) recording heads are a minimal flying height and a perfect track following. By applying Micro Electro-mechanical Micro Systems (MEMS) technology, a Slider with an Integrated Microactuator (SLIM) enabling both in a cost competitive way was created. This paper describes the fabrication process for the system's electromagnetic microatuator and emphasizes the technology enhancements achieved after a process redesign. INTRODUCTIONA precondition to achieve an optimal recording density is a hard disk recording head which provides both a flying height adjustment and a second stage actuation capability for fine tracking [1][2][3]. To fulfill these requirements in a cost competitive way, a slider with an integrated microactuator (SLIM) was proposed [4]. A variable reluctance (VR) electromagnetic microactuator integrated into a pico formfactor slider (1,240 µm x 990 µm x 300 µm) activates a mounting platform which has a chiplet attached to it. The chiplet carries the read/write element. The microactuator is capable of moving the read/write element up and down (for head-to-disk spacing adjustment) as well as on an arc in lateral direction (allowing second stage actuation) [5]. Figure 1 shows a schematic representation of the SLIM design compared to a commercial slider.

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“…This ultimately requires a thinning to a height of 100 µm for the application in the SLIM device during system integration [5]. Figure 4 and Tab.…”

Section: Fabrication Stepsmentioning

confidence: 99%

Section: Microactuator Evaluationmentioning

confidence: 99%

See 1 more Smart Citation

Improved Fabrication of an Integrated Electromagnetic Second Stage Microactuator for a Hard Disk Recording Head

Saalfeld

Dinulovic

Gatzen

2009

Volume 12: Micro and Nano Systems, Parts a and B

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“…The concept of a SILM has been recently reported by Gatzen et al 3 and Dinulovic et al 4 In this design, a pair of magnetic microactuators is integrated into the slider, allowing flying height adjustment over a rotating hard disk by movement in the vertical direction, as well as a second stage actuation by movement in the lateral direction.…”

Section: Magnetic Microactuatormentioning

confidence: 99%

Evaluation of an electromagnetic microactuator using scanning Hall probe microscopy measurements

Dinulovic

Saalfeld

Celiński

et al. 2009

Journal of Applied Physics

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Strain imaging of a magnetic layer formed on an air bearing surface of a hard disk drive head for perpendicular recording J.Thermal pole tip protrusion finite element analysis of thin film inductive recording heads Scanning Hall probe microscopy ͑SHPM͒ was used to evaluate integrated magnetic microactuators designed for hard disk drives. The Hall probe measurements of the generated magnetic field strength as a function of the applied current or distance were compared to results of a finite element method simulation. The SHPM measurements and simulation results are in good agreement, confirming that simulations supported by SHPM measurements can be used successfully to predict the performance of microactuators.

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“…The actuators are either mounted on the suspension or on the slider. There are also approaches that have the micro-actuator integrated in the slider and allow a flying height adjustment in addition to off-track positioning (14) . A good overview of available second-stage actuators and control schemes is given in (15) .…”

Section: Introductionmentioning

confidence: 99%

Modeling and Control of a Dual Stage Actuator Hard Disk Drive

Boettcher

Callafon

Talke

2010

JAMDSM

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A data-based approach is presented for modeling and controller design of a dual-stage servo actuator in a hard disk drive. The servo actuator in this hard disk drive consists of a conventional voice coil motor and a piezo-electrically actuated suspension. A weighted Hankel matrix based realization algorithm that uses frequency domain data is applied to estimate a discrete-time model of the voice coil motor and the piezoelectric actuator. Based on the discrete-time models, different dual-stage track-following controllers were designed using classic and H ∞ loop shaping techniques. The controllers were implemented in real-time in the investigated hard disk drive. A stable feed-back control and good agreement between measurements and simulations show the promising result of data based modeling and control.

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A Slider With an Integrated Microactuator (SLIM) for Second Stage Actuation in Hard Disc Drives

Cited by 10 publications

References 5 publications

Improved Fabrication of an Integrated Electromagnetic Second Stage Microactuator for a Hard Disk Recording Head

Improved Fabrication of an Integrated Electromagnetic Second Stage Microactuator for a Hard Disk Recording Head

Evaluation of an electromagnetic microactuator using scanning Hall probe microscopy measurements

Modeling and Control of a Dual Stage Actuator Hard Disk Drive

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