Aluminum Nitride Cross-Sectional Lamé Mode Resonators

Cassella, Cristian; Huang, Yu; Qian, Zhenyun; Hummel, Gwendolyn; Rinaldi, Matteo

doi:10.1109/jmems.2015.2512379

Cited by 102 publications

(40 citation statements)

References 29 publications

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“…The device with of 2.2 μm suffers from adjacent low K 2 spurious mode. A close examination is required for frequency-scaling A1 SPUDT ADLs as the higher number of eigenmodes per unit frequency range around higher-order acoustic modes [42] might create spurious modes. To sum up, we present the A1 SPUDT ADLs in Section II.…”

Section: E Key Design Parameters Of A1 Spudt Adlmentioning

confidence: 99%

Low-Loss 5-GHz First-Order Antisymmetric Mode Acoustic Delay Lines in Thin-Film Lithium Niobate

Yang

Link

et al. 2021

IEEE Trans. Microwave Theory Techn.

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In this work, we present the low-loss acoustic delay lines (ADLs) at 5 GHz, using the first-order antisymmetric (A1) mode in 128 • Y-cut lithium niobate thin films. The ADLs use a single-phase unidirectional transducer (SPUDT) design with a feature size of quarter acoustic wavelength. The design space is analytically explored and experimentally validated. The fabricated miniature A1 ADLs with a feature size of 0.45 µm show a high operating frequency at 5.4 GHz, a minimum insertion loss (IL) of 3 dB, a fractional bandwidth (FBW) of 1.6%, and a small footprint of 0.0074 mm 2. The low IL and high operating frequency have significantly surpassed the state-of-theart performance of ADLs. The propagation characteristics of A1 acoustic waves have also been extracted. The demonstrated designs can lead to low-loss and high-frequency transversal filters for future 5G applications in the sub-6-GHz bands.

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Section: E Key Design Parameters Of A1 Spudt Adlmentioning

confidence: 99%

Low-Loss 5-GHz First-Order Antisymmetric Mode Acoustic Delay Lines in Thin-Film Lithium Niobate

Yang

Link

et al. 2021

IEEE Trans. Microwave Theory Techn.

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“…There has also been active research on the improvement of various aspects of MEMS resonators for frequency filtering applications, such as producing high-Q, high-frequency, and highly selective filters, [10][11][12][13][14][15][16][17][18][19][20][21][22][23][24][25][26][27][28][29] Both electrically and mechanically coupled resonators have been demonstrated for filter applications. [10][11][12][13][14][15][16][17] Highly tunable filters were studied, where the centre frequency and the bandwidth can be tuned independently.…”

Section: The Manuscriptmentioning

confidence: 99%

“…[10][11][12][13][14][15][16][17] Highly tunable filters were studied, where the centre frequency and the bandwidth can be tuned independently. [18][19][20][21][22][23] Furthermore, various designs of resonators have been explored, such as ring shaped and rectangular plate resonators, to achieve high-Q high-frequency filter operation.…”

Section: The Manuscriptmentioning

confidence: 99%

Exploiting nonlinearities of micro-machined resonators for filtering applications

Ilyas

Chappanda

Younis

2017

Applied Physics Letters

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We demonstrate the exploitation of the nonlinear behavior of two electrically coupled microbeam resonators to realize a band-pass filter. More specifically, we combine their nonlinear hardening and softening responses to realize a near flat pass band filter with sharp roll-off characteristics. The device is composed of two near identical doubly clamped and electrostatically actuated microbeams made of silicon. One of the resonators is buckled via thermal loading to produce a softening frequency response. It is then further tuned to create the desired overlap with the second resonator response of hardening behavior. This overlapping improves the pass band flatness. Also, the sudden jumps due to the softening and hardening behaviors create sharp roll-off characteristics. This approach can be promising for the future generation of filters with superior characteristics.

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Section: The Manuscriptmentioning

confidence: 99%

Exploiting Nonlinear Behavior of MEMS Resonators for Filter Applications

Ilyas

Younis

2017

Volume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- And Nanosystems

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We propose combining the hardening and softening nonlinearities of two resonators to realize a near flat pass band filter of almost zero roll-off. The device is composed of two near identical doubly clamped and laterally actuated microbeams made of Silicon. One of the resonators is buckled via thermal loading to produce softening resonance peak. It is then further tuned to create the desired overlap with the hardening resonance peak of the other resonator. This overlapping improves the filter’s pass band flatness and roll-off characteristics, which are highly desirable. This technique can be promising for future generation of filters with superior characteristics.

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Aluminum Nitride Cross-Sectional Lamé Mode Resonators

Cited by 102 publications

References 29 publications

Low-Loss 5-GHz First-Order Antisymmetric Mode Acoustic Delay Lines in Thin-Film Lithium Niobate

Low-Loss 5-GHz First-Order Antisymmetric Mode Acoustic Delay Lines in Thin-Film Lithium Niobate

Exploiting nonlinearities of micro-machined resonators for filtering applications

Exploiting Nonlinear Behavior of MEMS Resonators for Filter Applications

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