AlN-based film buck acoustic resonator operated in shear mode for detection of carcinoembryonic antigens

Zheng, Dewen; Xiong, Juan; Guo, Peng; Wang, Shengfu; Gu, Haoshuang

doi:10.1039/c5ra21900k

Cited by 14 publications

(12 citation statements)

References 31 publications

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“…Zheng et al [137] have reported a shear mode film buck acoustic resonator operated with resonant frequency near 1.2 GHz for carcinoembryonic antigens (CEA) detection in liquid environment. The device was fabricated and integrated with a polydimethylsiloxane (PDMS) microchannel.…”

Section: Mechanical Based Biosensors For Chemicals and Pesticidesmentioning

confidence: 99%

Recent Progress in the Development of Biosensors for Chemicals and Pesticides Detection

et al. 2020

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Chemicals and pesticides contamination in the food, drinking water, and environment ecosystem have become one of the most serious problems for human public health in the world due to their large amount used and wide application in the agriculture industry. Therefore, the detection and analysis of contamination in the food and drinking water by using techniques that are simple and suitable for fast screening are important. This review gives an overview of the last trends and recent advances biosensors for chemicals and pesticides detection based on electrochemical, optical and mechanical transducers strategies. Furthermore, the biosensors are classified according to their immobilized biorecognition elements including aptamer, antibodies, enzymes, and molecularly imprinted polymers. The implementation of nanomaterials such as graphene, carbon nanotubes, and metals nanoparticles are also emphasized and discussed in this review, these nanomaterials provides remarkable features to the biosensors such highly sensitive and accurate which allowing efficient pesticides detection. In addition to highlighting and summarizing various novel sensors, this review also provided some drawbacks, challenging, prospects as well as the current efforts to enhanced optical sensors. INDEX TERMS Biosensors, chemical detection, electrochemical transducer, mechanical transducer, optical transducer, pesticides detection.

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Section: Mechanical Based Biosensors For Chemicals and Pesticidesmentioning

confidence: 99%

Recent Progress in the Development of Biosensors for Chemicals and Pesticides Detection

et al. 2020

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“…The binding ratio for protein G is 10% higher than that of protein A (20.8%), indicating that protein G can immobilize more antibody than protein A and/or provide better antibody orientations. More recently, Zheng et al (Zheng et al 2014;Zheng et al 2016b) have also used AlN-based FBARs to detect the CEA.…”

Section: Fbars As Protein Biosensorsmentioning

confidence: 99%

“…A frequency downward shift of 28 kHz was successfully detected, which is not achievable if the FBAR is not integrated with a microfluidic device. More recently, Zheng at al (Zheng et al 2016b…”

mentioning

confidence: 97%

“…(B) fr shifts of FBAR after the adsorption of anti-hPSA antibody (5 mg/L) for 15 min, BSA (50 mg/L) blocking for 15 min and antigen (hPSA, 5 mg/L) binding for 15 min (Zhao et al 2014). (Copyright © 2014 Elsevier Ltd.)Other than PSA, FBARs have also been fabricated to detect other cancer biomarkers such as epithelial tumour marker (MUC1)Zheng et al 2016a), Alpha-fetoprotein (AFP)) and carcinoembryonic antigen (CEA)Lee and Song 2010;Zheng et al 2014;Zheng et al 2016b). An AlN-based FBAR was fabricated with fr approximately 575 MHz as an immunosensor to detect MUC1.…”

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confidence: 99%

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Film bulk acoustic resonators (FBARs) as biosensors: A review

Zhang

Luo

Flewitt

et al. 2018

Biosensors and Bioelectronics

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Biosensors play important roles in different applications such as medical diagnostics, environmental monitoring, food safety, and the study of biomolecular interactions. Highly sensitive, label-free and disposable biosensors are particularly desired for many clinical applications. In the past decade, film bulk acoustic resonators (FBARs) have been developed as biosensors because of their high resonant frequency and small base mass (hence greater sensitivity), lower cost, label-free capability and small size. This paper reviews the piezoelectric materials used for FBARs, the optimisation of device structures, and their applications as biosensors in a wide range of biological applications such as the detection of antigens, DNAs and small biomolecules. Their integration with microfluidic devices and high-throughput detection are also discussed.

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“…The thickness shear mode (TSM), whose particle displacement is parallel to the piezoelectric film surface, has a better resonance performance in liquids [ 10 ]. In order to obtain the shear mode resonance, many efforts have been made to grow inclined c -axis–oriented piezoelectric film coupled with two electrodes situated on the opposite sides of the film [ 13 , 14 , 15 ]. This method required complicated equipment and a difficult process to achieve a homogeneous c -axis tilt across the wafer.…”

Section: Introductionmentioning

confidence: 99%

The High Q Factor Lateral Field–Excited Thickness Shear Mode Film Bulk Acoustic Resonator Working in Liquid

et al. 2016

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A high Q factor film bulk acoustic resonator operating in thickness shear mode excited by a lateral field is described in this paper. The influence of electrode parameters on the resonator performance is studied by the finite element method. The results showed that three key electrode parameters, including the gap, length and width, played important roles in the optimization of the resonator performance. The highest Q factor of up to 643 was obtained when the parallel electrodes were designed to be 100 µm × 10 µm with the electrode gap of 10 µm. Based on the simulation results, the AlN-based film bulk acoustic resonator with a solidly mounted structure was fabricated. The testing results showed that the real device operated at the resonance frequency of 1.94 GHz with the Q factor of 405 in air, 216 in water and 102 in phosphate buffered saline solution.

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AlN-based film buck acoustic resonator operated in shear mode for detection of carcinoembryonic antigens

Abstract: A film buck acoustic resonator (FBAR) operated in shear mode was fabricated and integrated with a microchannel for detection of the carcinoembryonic antigens (CEA).

Cited by 14 publications

References 31 publications

Recent Progress in the Development of Biosensors for Chemicals and Pesticides Detection

Recent Progress in the Development of Biosensors for Chemicals and Pesticides Detection

Film bulk acoustic resonators (FBARs) as biosensors: A review

The High Q Factor Lateral Field–Excited Thickness Shear Mode Film Bulk Acoustic Resonator Working in Liquid

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