Alignment of Laboratory-Scale Soft X-ray Microscope Using Laser Plasma

Abstract

A detailed theoretical assessment is made of a helicon-supporting element of a new type of microwave filter constructed in a Fabry-Perot manner, well-known in optical physics. The optimum properties are discussed and the behaviour of a slab of InSb, biased by an external magnetic field, is analysed. A novel analysis of tunability is introduced, and numerical results are presented which include loss per wavelength and loci of the real part of the helicon wavenumber. Some of the numerical work is discussed analytically, using a one-component plasma as a simplification. It is proved that, for InSb, there is a peak tunability for slightly p-type material, while the minimum power loss occurs for slightly n-type material. A discussion is also presented in terms of the Q-value of the filter performance.

Development of compact high precision linear piezoelectric stepping positioner with nanometer accuracy and large travel range

“…The positioner was fabricated according to the design specifications and performance evaluation tests were carried out. A resolution of 10 nm, speed of 1.1 mm/ s, push force of 25 N, and stiffness of 10 N / m were obtained while maintaining a compact size of 32ϫ 42ϫ 60 mm 3 . The required power consumption was 52.33 W. The above test results confirm that the developed positioner could be successfully applied to the precision alignment of optical elements.…”

“…1 One example is the x-ray microscope, which can be employed for the imaging of biological, medical, and colloidal samples due to its higher resolution and the natural mechanism that contrasts water with carbon-based substances. 2 To obtain an x-ray microscope image, the optical elements must be aligned very accurately in the designed position 3 and precision alignment stages are required for this work. The present work focuses on the development of a stage suitable for precision optics alignment.…”

Fresnel zone plate telescope for condenser alignment in water-window microscope

“…Thus, more often, direct methods, such as a direct projection onto a CCD detector, or more complicated automatic procedures [14] are used. However, sometimes, due to vacuum chamber geometry restrictions, a direct visualization of the condenser illumination pattern cannot be performed.…”

Development of flexure based 6-degrees of freedom parallel nano-positioning system with large displacement

“…[1][2][3][4][5] For the proper operation of these optical systems, it is necessary that all of optical elentments should be alinged accurately in their pre-defined position. For example, in an x-ray microscopy, precision alignment between the illumination optic and objective optic must be achieved in order to obtain a uniform and bright image with a reasonable signal to noise ratio.…”

“…For example, in an x-ray microscopy, precision alignment between the illumination optic and objective optic must be achieved in order to obtain a uniform and bright image with a reasonable signal to noise ratio. 4 In projection lens system of semiconductor manufacturing, an acceptable aberration level should be obtained by aligning each lens element sufficiently, as reducing aberration is essential for producing the critical dimension of less than 3x nanometer node and the overlay performance less than 5 nm. In addition, precision mirror alignment is crucial for the effective functioning of a space telescope.…”