Aligned carbon nanotube array functionalization for enhanced atomic layer deposition of platinum electrocatalysts

Dameron, Arrelaine A.; Pylypenko, Svitlana; Bult, Justin; Neyerlin, K.C.; Engtrakul, Chaiwat; Bochert, Christopher; Leong, G. Jeremy; Frisco, Sarah; Simpson, Lin; Dinh, Huyen N.; Pivovar, Bryan S.

doi:10.1016/j.apsusc.2012.01.139

Cited by 53 publications

(43 citation statements)

References 41 publications

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“…Despite these challenges, ALD of noble metals is particularly interesting because of the catalytic properties of these materials. Platinum (Pt), in particular, is often desired as catalyst in electrochemical applications ranging from fuels cells to biosensors [57][58][59][60][61][62][63]. This also explains why Pt precursor for ALD is one of the best studied of all the available noble metal precursors after Ruthenium [64,65].…”

Section: Introductionmentioning

confidence: 99%

Pt–Al₂O₃dual layer atomic layer deposition coating in high aspect ratio nanopores

Pardon¹,

Gatty²,

Stemme³

et al. 2012

Nanotechnology

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PostprintThis is the accepted version of a paper published in Nanotechnology. This paper has been peerreviewed but does not include the final publisher proof-corrections or journal pagination. Citation for the original published paper (version of record):Pardon, G., Gatty, H., Stemme, G., van der Wijngaart, W., Roxhed, N. (2013) Pt-Al2O3 dual layer atomic layer deposition coating in high aspect ratio nanopores. Abstract. Functional nanoporous materials are promising for a number of applications ranging from selective biofiltration to fuel cell electrodes. This work reports the functionalization of nanoporous membranes using atomic layer deposition (ALD). ALD is used to conformally deposit platinum (Pt) and aluminium oxide (Al 2 O 3 ) on Pt in nanopores to form a metal-insulator stack inside the nanopore. Deposition of these materials inside nanopores allows adding extra functionalities to nanoporous materials such as anodic aluminium oxide (AAO) membranes. Conformal deposition of Pt on such materials enables increased performances for electrochemical sensing applications or fuel cell electrodes. An additional conformal Al 2 O 3 layer on such Pt film forms a metalinsulator-electrolyte system, enabling field effect control of the nanofluidic properties of the membrane. This opens novel possibilities in electrically controlled biofiltration. In this work, the deposition of these two materials on AAO membrane is investigated theoretically and experimentally. Successful process parameters are proposed for a reliable and cost-effective conformal deposition on high aspect ratio 3D nanostructures. A device consisting of a silicon chip supporting an AAO membrane of 6 mm diameter and 1.3 μm thickness with 80 nm diameter pores is fabricated. The pore diameter is reduced to 40 nm by a conformal deposition of 11 nm Pt and 9 nm Al 2 O 3 using ALD. Nanotechnology IntroductionIn recent years, the interest for novel functional and well-controlled nanoporous materials has grown extensively [1][2][3][4][5]. Nanoporous materials possess a number of interesting features. At the nanoscale, the increased surface-to-volume ratio (~! !! ) enhances the interaction between liquid analytes or electrolyte and the device surface. In addition, the porosity,1 These authors contributed equally to this work.!, increases the effective surface area of the macroscopic material (~!). The porosity also increases the line length of triple phase (solid, liquid, gas) interfaces (~! !! ! ). The increased surface-to-volume is an advantage for surface governed phenomena, such as molecular transport in nanofluidics, largely governed by the surface charges via the electrical double layer (EDL) [6][7][8]. The increased effective surface area improves surface limited phenomena, such as overpotential losses in electrodes [9,10] and the increased line length of the triple phase interface allows increasing the current density in fuel cells [11] or the sensitivity in gas-and biosensors [12][13][14][15][16]. In addition to these intrinsic features, embedding fu...

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Section: Introductionmentioning

confidence: 99%

Pt–Al₂O₃dual layer atomic layer deposition coating in high aspect ratio nanopores

Pardon¹,

Gatty²,

Stemme³

et al. 2012

Nanotechnology

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“…This is surprising when considering that Pt ALD initiation on carbon nanotubes has been reported to be challenging. [37][38][39] However, EBID of Pt has been achieved on carbon nanotubes in several studies. 27,40 The microstructure of the EBID seed layer consisting of Pt grains embedded in amorphous carbon 41 most likely plays an important role in the nucleation of Pt ALD on the carbon nanotube.…”

mentioning

confidence: 99%

Resist-free fabricated carbon nanotube field-effect transistors with high-quality atomic-layer-deposited platinum contacts

Mackus

Thissen

Mulders³

et al. 2017

Applied Physics Letters

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“…Potentially, such an approach might also be applied to VACNFs/VACNTs. Dameron et al used gas phase functionalization of aligned CNT arrays to improve the number of nucleation sites and the uniformity of the coating for the atomic layer Pt deposition . Their study revealed that the O 2 plasma functionalization offers a uniform deposition of Pt nanoparticles (6 nm diameter) along the 25 µm long CNTs.…”

Section: D Ordered Catalytic Layers Based On Vertically Aligned Nanomentioning

confidence: 99%

“…Dameron et al used gas phase functionalization of aligned CNT arrays to improve the number of nucleation sites and the uniformity of the coating for the atomic layer Pt deposition. 76 Their study revealed that the O 2 plasma functionalization offers a uniform deposition of Pt nanoparticles (6 nm diameter) along the 25 μm long CNTs. At variance, the trimethylaluminium chemical functionalization route greatly increases the rate of Pt deposition leading to the formation of larger (13 nm mean diameter) Pt nanoparticles.…”

Section: D Ordered Catalytic Layers Based On Vertically Aligned Nanomentioning

confidence: 99%

Advanced catalytic layer architectures for polymer electrolyte membrane fuel cells

Bonnefont

Ruvinskiy

Rouhet

et al. 2014

WIREs Energy & Environment

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Proton exchange membrane fuel cells (PEMFCs) have recently reached a remarkable level of performance. Their high cost, however, has a negative impact on the market penetration. Present work reviews recent developments of advanced catalytic layer architectures proposed as an alternative to the conventional ones in view of decreasing the Pt loading and increasing the Pt‐specific power density. Various promising approaches will be discussed starting from the widely known 3M's nanostructured thin films to less publicized Pt‐decorated arrays of aligned carbon nanotubes/nanofibers. The issues to be addressed span from the preparation of three‐dimensionally ordered layers, to fundamental questions related to the optimization of their spatial structure to attain the maximum efficiency of material utilization and activity. WIREs Energy Environ 2014, 3:505–521. doi: 10.1002/wene.110 This article is categorized under: Fuel Cells and Hydrogen > Science and Materials Energy Efficiency > Science and Materials Energy Research & Innovation > Science and Materials

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Aligned carbon nanotube array functionalization for enhanced atomic layer deposition of platinum electrocatalysts

Cited by 53 publications

References 41 publications

Pt–Al₂O₃dual layer atomic layer deposition coating in high aspect ratio nanopores

Pt–Al₂O₃dual layer atomic layer deposition coating in high aspect ratio nanopores

Resist-free fabricated carbon nanotube field-effect transistors with high-quality atomic-layer-deposited platinum contacts

Advanced catalytic layer architectures for polymer electrolyte membrane fuel cells

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Aligned carbon nanotube array functionalization for enhanced atomic layer deposition of platinum electrocatalysts

Cited by 53 publications

References 41 publications

Pt–Al2O3dual layer atomic layer deposition coating in high aspect ratio nanopores

Pt–Al2O3dual layer atomic layer deposition coating in high aspect ratio nanopores

Resist-free fabricated carbon nanotube field-effect transistors with high-quality atomic-layer-deposited platinum contacts

Advanced catalytic layer architectures for polymer electrolyte membrane fuel cells

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Product

Resources

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Pt–Al₂O₃dual layer atomic layer deposition coating in high aspect ratio nanopores

Pt–Al₂O₃dual layer atomic layer deposition coating in high aspect ratio nanopores