2003
DOI: 10.1016/s0022-0248(03)01203-x
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Al2O3 nanotubes and nanorods fabricated by coating and filling of carbon nanotubes with atomic-layer deposition

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Cited by 104 publications
(57 citation statements)
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“…Lee et al was first to report coating CNFs via ALD as they successfully coated bamboo-type nanofibers with Al 2 O 3 using trimethylaluminum and distilled water. 101 They demonstrated uniform and controlled growth of amorphous Al 2 O 3 on the outside of the fibers and also demonstrated that the interior cavities of the fibers could also be coated to varying degrees. Later, Herrmann et al also coated CNTs with Al 2 O 3 and Al 2 O 3 / W bilayer via ALD.…”
Section: Atomic Layer Depositionmentioning
confidence: 96%
See 1 more Smart Citation
“…Lee et al was first to report coating CNFs via ALD as they successfully coated bamboo-type nanofibers with Al 2 O 3 using trimethylaluminum and distilled water. 101 They demonstrated uniform and controlled growth of amorphous Al 2 O 3 on the outside of the fibers and also demonstrated that the interior cavities of the fibers could also be coated to varying degrees. Later, Herrmann et al also coated CNTs with Al 2 O 3 and Al 2 O 3 / W bilayer via ALD.…”
Section: Atomic Layer Depositionmentioning
confidence: 96%
“…ALD has been used by a few research groups to coat CNTs and CNFs. [99][100][101] ALD is particularly suited for coating large area and high aspect ratio structures because it allows atomic layer thickness control over an entire surface by a sequence of self-limiting reactions. Lee et al was first to report coating CNFs via ALD as they successfully coated bamboo-type nanofibers with Al 2 O 3 using trimethylaluminum and distilled water.…”
Section: Atomic Layer Depositionmentioning
confidence: 99%
“…One is a sol-gel method using tetraethoxysilane (TEOS) [36]. The other is atomic-layer deposition using trimethylaluminum (TMA) [37]. However, to date, a method for precise control of the thickness and stoichiometry of insulator-coated CNTs has not been established.…”
Section: A Coating Technique Of Carbon Nanotubesmentioning
confidence: 99%
“…Several routes have been reported for the synthesis of nanostructured materials including hydrothermal, [3][4][5][6][7][8][9][10][11][12][13] solgel, [14][15][16][17] anodisation, [18][19][20] atomic layer deposition 21 and wet etching. 22 Amongst these, hydrothermal methods are popular as they are cheap, reproducible, simple and can be easily scaled up.…”
Section: Introductionmentioning
confidence: 99%